Searched for: subject%3A%22deposition%22
(61 - 80 of 280)

Pages

document
Illiberi, A. (author), Katsouras, I. (author), Gazibegovic, S. (author), Cobb, B. (author), Nekovic, E. (author), van Boekel, W. (author), Frijters, C. (author), Maas, J. (author), Roozeboom, F. (author), Creyghton, Y. (author), Gelinck, G. (author)
In this manuscript, the authors investigate the growth of indium zinc oxide, indium zinc oxide (InZnO, IZO) as a channel material for thin-film transistors. IZO is grown at atmospheric pressure and a high deposition rate using spatial atomic layer deposition (S-ALD). By varying the ratio of diethylzinc and trimethylindium vapor, the In/(In þ Zn)...
article 2018
document
Theelen, M.J. (author), de Graaf, F. (author), Daume, F. (author), Barreau, N. (author), Vroon, Z.A.E.P. (author), Zeman, M. (author)
Degradation rates and mechanisms for molybdenum back contacts and ZnO:Al front contacts exposed to damp heat were obtained from literature and experiments. It was found that molybdenum back contacts with a higher density and covered by a MoSe2 film are more stable than their low density, bare counterparts. For ZnO:Al front contacts various...
conference paper 2018
document
Blanker, J. (author), Vroon, Z.A.E.P. (author), Zeman, M. (author), Smets, A. (author)
Copper-indium-gallium-di-selenide (CIGS) is the present record holder in lab-scale thin-film photovoltaics (TF-PV). One of the problems of this PV technology is the scarcity of indium. Multi-junction solar cells allow better spectral utilization of the light spectrum, while the required current generation per layer is much lower, allowing much...
conference paper 2018
document
Mameli, A. (author), Karasulu, B. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2018
document
Yang, G. (author), Guo, P. (author), Procel, P. (author), Weber, A.W. (author), Isabella, O. (author)
The poly-Si carrier-selective passivating contacts (CSPCs) parasitically absorb a substantial amount of light, especially in the form of free carrier absorption. To minimize these losses, we developed CSPCs based on oxygen-alloyed poly-Si (poly-SiOx) and deployed them in c-Si solar cells. Transmission electron microscopy analysis indicates the...
article 2018
document
Wu, Y. (author), Giddings, A.D. (author), Verheijen, M.A. (author), Macco, B. (author), Prosa, T.J. (author), Larson, D.J. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)
The maximum conductivity achievable in Al-doped ZnO thin films prepared by atomic layer deposition (ALD) is limited by the low doping efficiency of Al. To better understand the limiting factors for the doping efficiency, the threedimensional distribution of Al atoms in the ZnO host material matrix has been examined on the atomic scale using a...
article 2018
document
Koivisto, A.J. (author), Kling, K.I. (author), Fonseca, A.S. (author), Brostrøm Bluhme, A. (author), Moreman, M. (author), Yu, M. (author), Costa, A.L. (author), Giovanni, B. (author), Ortelli, S. (author), Fransman, W. (author), Vogel, U. (author), Jensen, K.A. (author)
Nanoscale TiO2 (nTiO2) is manufactured in high volumes and is of potential concern in occupational health. Here, we measured workers exposure levels while ceramic honeycombs were dip coated with liquid photoactive nanoparticle suspension and dried with an air blade. The measured nTiO2 concentration levels were used to assess process specific...
article 2018
document
Petruzella, M. (author), Zobenica, Z. (author), Cotrufo, M. (author), Zardetto, V. (author), Mameli, A. (author), Pagliano, F. (author), Koelling, S. (author), van Otten, F.W.M. (author), Roozeboom, F. (author), Kessels, W.M.M. (author), van der Heijden, R.W. (author), Fiore, A. (author)
A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This...
article 2018
document
Kuang, Y. (author), Zardetto, V. (author), van Gils, R. (author), Karwal, S. (author), Koushik, D. (author), Verheijen, M.A. (author), Black, L.E. (author), Weijtens, C. (author), Veenstra, S.C. (author), Andriessen, H.A.J.M. (author), Kessels, W.M.M. (author), Creatore, M. (author)
In this work, we present an extensive characterization of plasma-assisted atomic-layer-deposited SnO2 layers, with the aim of identifying key material properties of SnO2 to serve as an efficient electron transport layer in perovskite solar cells (PSCs). Electrically resistive SnO2 films are fabricated at 50 °C, while a SnO2 film with a low...
article 2018
document
Bijl, P.K. (author), Houben, A.J.P. (author), Bruls, A. (author), Pross, J. (author), Sangiorgi, F. (author)
There is growing interest in the scientific community in reconstructing the paleoceanography of the Southern Ocean during the Oligocene-Miocene because these time intervals experienced atmospheric CO2 concentrations with relevance to our future. However, it has remained notoriously difficult to put the sedimentary archives used in these efforts...
article 2018
document
conference paper 2017
document
Poodt, P.W.G. (author), Mameli, A. (author), Schulpen, J.J.P.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
Atomic layer deposition (ALD) is renowned for its step coverage in porous substrates. Several emerging applications require a combination of this high step coverage with high throughput ALD, like spatial ALD. Often, high throughput ALD is performed at atmospheric pressure, and therefore, the effect of reactor pressure on the saturation dose is...
article 2017
document
Mameli, A. (author), Karasulu, B. (author), Barcones, B. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2017
document
Nielsen, J.J. (author), Ganem, H. (author), Jorguseski, L. (author), Alic, K. (author), Smolnikar, M. (author), Zhu, Z. (author), Pratas, N.K. (author), Golinski, M. (author), Zhang, H. (author), Kuhar, U. (author), Fan, Z. (author), Svigelj, A. (author)
Electricity production and distribution is facing two major changes. First, production is shifting from classical energy sources such as coal and nuclear power toward renewable resources such as solar and wind. Second, consumption in the low voltage grid is expected to grow significantly due to the expected introduction of electrical vehicles....
article 2017
document
Ahvenniemi, E. (author), Akbashev, A.R. (author), Ali, S. (author), Bechelany, M. (author), Berdova, M. (author), Boyadjiev, S. (author), Cameron, D.C. (author), Chen, R. (author), Chubarov, M. (author), Cremers, V. (author), Devi, A. (author), Drozd, V. (author), Elnikova, L. (author), Gottardi, G. (author), Grigoras, K. (author), Hausmann, D.M. (author), Seong Hwang, C. (author), Jen, S.H. (author), Kallio, T. (author), Kanervo, J. (author), Khmelnitskiy, I. (author), Kim, D.H. (author), Klibanov, L. (author), Koshtyal, Y. (author), Krause, A.O.I. (author), Kuhs, J. (author), Kärkkänen, I. (author), Kääriäinen, M.L. (author), Kääriäinen, T. (author), Lamagna, L. (author), Łapicki, A.A. (author), Leskelä, M. (author), Lipsanen, H. (author), Lyytinen, J. (author), Malkov, A. (author), Malygin, A. (author), Mennad, A. (author), Militzer, C. (author), Molarius, J. (author), Norek, M. (author), Özgit-Akgün, Ç. (author), Panov, M. (author), Pedersen, H. (author), Piallat, F. (author), Popov, G. (author), Puurunen, R.L. (author), Rampelberg, G. (author), Ras, R.H.A. (author), Rauwel, E. (author), Roozeboom, F. (author), Sajavaara, T. (author), Salami, H. (author), Savin, H. (author), Schneider, N. (author), Seidel, T.E. (author), Sundqvist, J. (author), Suyatin, D.B. (author), Törndahl, T. (author), van Ommen, J.R. (author), Wiemer, C. (author), Ylivaara, O.M.E. (author), Yurkevich, O. (author)
Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas–solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and...
article 2017
document
Frijters, C. (author), van den Bruele, F. (author), Grob, F. (author), Illiberi, A. (author), Creyghton, Y. (author), Roozeboom, F. (author), Poodt, P. (author)
public lecture 2017
document
Illiberi, A. (author), Katsouras, I. (author), Gazibegovic, S. (author), Cobb, B. (author), Nekovic, E. (author), van Boekel, W. (author), Frijters, C. (author), Maas, J. (author), Roozeboom, F. (author), Creyghton, Y. (author), Poodt, P. (author), Gelinkck, G. (author)
public lecture 2017
document
Mameli, A. (author), Merkx, M. (author), Karasulu, B. (author), Roozeboom, F. (author), Kessels, W.M.M. (author), Mackus, A.J.M. (author)
public lecture 2017
document
Todea, A.M. (author), Beckmann, S. (author), Kaminski, H. (author), Bard, D. (author), Bau, S. (author), Clavaguera, S. (author), Dahmann, D. (author), Dozol, H. (author), Dziurowitz, N. (author), Elihn, K. (author), Fierz, M. (author), Lidén, G. (author), Meyer-Plath, A. (author), Monz, C. (author), Neumann, V. (author), Pelzer, J. (author), Simonow, B.K. (author), Thali, P. (author), Tuinman, I. (author), van der Vleuten, A. (author), Vroomen, H. (author), Asbach, C. (author)
Personal monitors based on unipolar diffusion charging (miniDiSC/DiSCmini, NanoTracer, Partector) can be used to assess the individual exposure to nanoparticles in different environments. The charge acquired by the aerosol particles is nearly proportional to the particle diameter and, by coincidence, also nearly proportional to the alveolar lung...
article 2017
document
Illiberi, A. (author), Katsouras, I. (author), Gazibegovic, S. (author), Cobb, B. (author), Nekovic, E. (author), van Boekel, W. (author), Frijters, C. (author), Maas, J. (author), Roozeboom, F. (author), Creyghton, Y. (author), Poodt, P. (author), Gelinck, G. (author)
public lecture 2017
Searched for: subject%3A%22deposition%22
(61 - 80 of 280)

Pages