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Illiberi, A. (author), Grob, F. (author), Frijters, C. (author), Poodt, P. (author), Ramachandra, R. (author), Winands, H. (author), Simor, M. (author), Bolt, P.J. (author)Undoped zinc oxide (ZnO) films have been grown on a moving glass substrate by plasma-enhanced chemical vapor deposition at atmospheric pressure. High deposition rates of ∼7 nm/s are achieved at low temperature (200°C) for a substrate speed from 20 to 60 mm/min. ZnO films are highly transparent in the visible range (90%). By a short (∼minute)...article 2013
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Erkens, I.J.M. (author), Blauw, M.A. (author), Verheijen, M.A. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)Ultralow-power gas sensing devices need to operate without an energy consuming heater element. This requires the design of sensing devices that are so efficient that they can operate at room temperature (RT). Here, we report on the RT sensing performance of atomic layer deposition (ALD) prepared i-ZnO and Al-doped ZnO sensing devices. The...article 2013
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van Deelen, J. (author), Illiberi, A. (author), Kniknie, B. (author), Beckers, E.H.A. (author), Simons, P.J.P.M. (author), Lankhorst, A. (author)The deposition of zinc oxide has been performed by atmospheric pressure chemical vapor deposition and trends in growth rates are compared with the literature. Diethylzinc and tertiary butanol were used as the primary reactants and deposition rates above 800 nm/minwere obtained. The reaction kineticswere studied and detailed process modeling...article 2013
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Illiberi, A. (author), Scherpenborg, R. (author), Wu, Y. (author), Roozeboom, F. (author), Poodt, P. (author)The possibility of growing multicomponent oxides by spatial atmospheric atomic layer deposition has been investigated. To this end, Al xZn1-xO films have been deposited using diethyl zinc (DEZ), trimethyl aluminum (TMA), and water as Zn, Al, and O precursors, respectively. When the metal precursors (i.e., TMA and DEZ) are coinjected in the...article 2013
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van Deelen, J. (author), Illiberi, A. (author), Kniknie, B.J. (author), Steijvers, H.L.A.H. (author), Lankhorst, A.M. (author), Simons, P.J.P.M. (author)Atmospheric pressure chemical vapor deposition (APCVD) of ZnO from diethyl zinc (DEZn) and t-butanol was performed using an industrial reactor design. Deposition profiles were recorded to gain insight in the position dependent variations in layer thickness in such a reactor. We observed that for a deposition temperature below 400 °C most of the...article 2013
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Wu, Y. (author), Hermkens, P.M. (author), van de Loo, B.W.H. (author), Knoops, H.C.M. (author), Potts, S.E. (author), Verheijen, M.A. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)In this work, the structural, electrical, and optical properties as well as chemical bonding state of Al-doped ZnO films deposited by atomic layer deposition have been investigated to obtain insight into the doping and electrical transport mechanisms in the films. The range in doping levels from 0% to 16.4% Al was accomplished by tuning the...article 2013
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Hettne, K.M. (author), Boorsma, A. (author), van Dartel, D.A.M. (author), Goeman, J.J. (author), de Jong, E. (author), Piersma, A.H. (author), Stierum, R.H. (author), Kleinjans, J.C. (author), Kors, J.A. (author)Background: Availability of chemical response-specific lists of genes (gene sets) for pharmacological and/or toxic effect prediction for compounds is limited. We hypothesize that more gene sets can be created by next-generation text mining (next-gen TM), and that these can be used with gene set analysis (GSA) methods for chemical treatment...article 2013
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Illiberi, A. (author), Roozeboom, F. (author), Poodt, P.W.G. (author)Zinc oxide thin films have been deposited at high growth rates (up to ~1 nm/s) by spatial atomic layer deposition technique at atmospheric pressure. Water has been used as oxidant for diethylzinc (DEZ) at deposition temperatures between 75 and 250 °C. The electrical, structural (crystallinity and morphology), and optical properties of the films...article 2012
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de Bruyn, P. (author), Moet, D.J.D. (author), Blom, P.W.M. (author)We present an all-solution processed polymer light-emitting diode (PLED) using spincoated zinc oxide (ZnO) and vanadium pentoxide (V2O5) as electron and hole injecting contact, respectively. We compare the performance of these devices to the standard PLED design using PEDOT:PSS as anode and Ba/Al as cathode. We show that the all-solution...article 2012
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Tripathi, A.K. (author), van der Putten, B. (author), van der Steen, J.L. (author), Tempelaars, K. (author), Cobb, B. (author), Ameys, M. (author), Ke, T.H. (author), Myny, K. (author), Steudel, S. (author), Nag, M. (author), Schols, S. (author), Vicca, P. (author), Smout, S. (author), Genoe, J. (author), Heremans, P. (author), Yakimets, I. (author), Gelinck, G.H. (author)We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that...conference paper 2012
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Andringa, A.-M. (author), Vlietstra, N. (author), Smits, E.C.P. (author), Spijkman, M.-J. (author), Gomes, H.L. (author), Klootwijk, J.H. (author), Blom, P.W.M. (author), de Leeuw, D.M. (author)Nitrogen dioxide (NO 2) detection with ZnO field-effect transistors is based on charge carrier trapping. Here we investigate the dynamics of charge trapping and recovery as a function of temperature by monitoring the threshold voltage shift. The threshold voltage shifts follow a stretched-exponential time dependence with thermally activated...article 2012
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George, A. (author), Stawski, T.M. (author), Unnikrishnan, S. (author), Veldhuis, S.A. (author), ten Elshof, J.E. (author)A simple and cost effective methodology for large area micro and nanopatterning of a wide range of functional materials on flexible substrates is presented. A hydrophobic-hydrophilic chemical contrast was patterned on surfaces of various flexible plastic substrates using molds and shadow masks with which selected areas of the substrate surface...article 2012
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- Lu, M. (author), de Bruyn, P. (author), Nicolai, H.T. (author), Wetzelaer, G.-J.A.H. (author), Blom, P.W.M. (author) article 2012
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- Illiberi, A. (author), Simons, P.J.P.M. (author), Kniknie, B. (author), van Deelen, J. (author), Theelen, M.J. (author), Zeman, M. (author), Tijssen, M. (author), Zijlmans, W. (author), Steijvers, H.L.A.H. (author), Habets, D. (author), Janssen, A.C. (author), Beckers, E.H.A. (author) article 2012
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Knoben, W. (author), Crego-Calama, M. (author), Brongersma, S.H. (author)The nitric oxide (NO) binding properties of monolayers of four different protoporphyrins IX adsorbed on aluminum oxide surfaces have been investigated. XPS and AFM results are consistent with the presence of a monolayer of porphyrins, bound to the surface by their carboxylic acid groups and with the porphine ring oriented more or less...article 2012
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van Deelen, J. (author), Illiberi, A. (author), Hovestad, A. (author), Barbu, I. (author), Klerk, L. (author), Buskens, P.J.P. (author)An overview of different transparent conductors is given. In addition, atmospheric pressure CVD of ZnO resulted in conductivities below 1 mΩ cm for a temperature of 480°C, whereas at a process temperature of 200°C a value of 2 mΩ cm was obtained. Also atmospheric pressure spatial ALD was used to make conductive ZnO. Furthermore, the properties...conference paper 2012
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Dam, V.A.T. (author), Blauw, M.A. (author), Brongersma, S.H. (author), Crego-Calama, M. (author)In this work, a room-temperature sensing device for detecting carbon monoxide using a ZnO thin film is presented. The ZnO layer (thickness close to the Debye length), which has a polycrystalline structure, is deposited with atomic-layer deposition (ALD) on an Al2O3/Si substrate. The operating principle of the sensor is based on measuring...conference paper 2011
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Torricelli, F. (author), Meijboom, J.R. (author), Smits, E. (author), Tripathi, A.K. (author), Gelinck, G.H. (author), Colalongo, L. (author), Kovacs-Vajna, Z.M. (author), de Leeuw, D. (author), Cantatore, E. (author)Abstract—Short-channel zinc oxide (ZnO) thin-film transistors (TFTs) are investigated in a wide range of temperatures and bias conditions. Scaling down the channel length, the TFT performance is seriously affected by contact resistances, which depend on gate voltage and temperature. To account for the contact resistances, the transistor is...article 2011
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Tripathi, A.K. (author), Smits, E.C.P. (author), van der Putten, J.B.P.H. (author), van Neer, M. (author), Myny, K. (author), Nag, M. (author), Steudel, S. (author), Vicca, P. (author), O'Neill, K. (author), van Veenendaal, E. (author), Genoe, G. (author), Heremans, P. (author), Gelinck, G.H. (author)In this work a technology to fabricate low-voltage amorphous gallium-indium-zinc oxide thin film transistors (TFTs) based integrated circuits on 25 µm foils is presented. High performance TFTs were fabricated at low processing temperatures (<150 °C) with field effect mobility around 17 cm2 /V s. The technology is demonstrated with circuit...article 2011
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Andringa, A.-M. (author), Meijboom, J.R. (author), Smits, E.C.P. (author), Mathijssen, S.G.J. (author), Blom, P.W.M. (author), de Leeuw, D.M. (author)Detection of nitrogen dioxide, NO2, is required to monitor the air-quality for human health and safety. Commercial sensors are typically chemiresistors, however field-effect transistors are being investigated. Although numerous investigations have been reported, the NO2 sensing mechanism is not clear. Here, the detection mechanism using ZnO...article 2011