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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), Tamer, M.S. (author), Hatakeyama, K. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Piras, D. (author)The semiconductor industry needs to fit ever more devices per unit area to improve their performance; hence a trend towards increasingly complex structures by varying material combinations and 3D geometries with increasing aspect ratios. The new materials used may be optically opaque, posing problems for traditional optical metrology methods....conference paper 2022
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Peternella, F.G. (author), Harmsma, P.J. (author), Horsten, R.C. (author), Zuidwijk, T. (author), Urbach, H.P. (author), Adam, A.J.L. (author)A new method for fast, high resolution interrogation of an array of photonic sensors is proposed. The technique is based on the integrated Fourier transform (FT) interrogator previously introduced by the authors. Compared to other interferometric interrogators, the FT-interrogator is very compact and has an unprecedented tolerance to variations...article 2021
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van Neer, P.L.M.J. (author), Quesson, B.A.J. (author), Tamer, M.S. (author), Hatakeyama, K. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Piras, D. (author)Several methods are being researched to detect and characterize buried nanoscale structures in hard solid samples. The most common acoustic method is acoustic microscopy. An acoustic microscope is based on a single element transducer operating in pulse-echo mode. The acoustic waves are coupled into a sample using a liquid couplant (eg water) and...article 2021
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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van Amerongen, A. (author), Rietjens, J. (author), Campo, J. (author), Dogan, E. (author), DIngjan, J. (author), Nalla, R. (author), Caron, J.F. (author), Hasekamp, O. (author)We have developed a 6 dm3-sized optical instrument to characterize the microphysical properties of fine particulate matter or aerosol in the Earth atmosphere from low Earth orbit. Our instrument can provide detailed and worldwide knowledge of aerosol amount, type and properties. This is important for climate and ecosystem science and human...conference paper 2018
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Lesundak, A. (author), Voigt, D. (author), Cip, O. (author), van den Berg, S. (author)Homodyne interferometry with a frequency comb as multi-wavelength source is a powerful method to measure long distances with high accuracy. The measurement principle requires that individual comb modes are spectrally resolved, making hundreds or thousands of accurately known wavelengths available for interferometry. For this reason the method...article 2017
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Brouwer, E.A.M. (author), van Buuren, R.A. (author), Gawlitta, N. (author), Grabarnik, S. (author), van der Valk, N.C.J. (author), Vink, H.J.P. (author), van Brug, H. (author), Visser, H. (author)Earth observation measurements at wavelengths below 320nm are challenging due to the steep decrease of the earth irradiance towards shorter wavelengths. Stray light and ghosting of longer wave light can easily overwhelm the signals at short wavelengths. In the UV channel (270-320nm) of the TROPOMI instrument this challenge has been addressed...conference paper 2017
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- Dobber, M.R. (author), Kleipool, Q. (author), Veefkind, J.P. (author), Levelt, P. (author), Rozemeijer, N. (author), Hoogeveen, R. (author), Aben, I. (author), de Vries, J. (author), Otter, G.C.J. (author) conference paper 2017
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Silvestri, F. (author), Gerini, G. (author), Bäumer, S.M.B. (author)In the last years, much interest has grown around the concept of optical surfaces employing high contrast dielectric resonators. However, a systematic approach for the design of this optical surfaces under particular requirements has never been proposed. In this contribution, we describe this approach applied to the robust design of an array of...conference paper 2017
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Bussink, P.G.W. (author), Volatier, J.B. (author), van der Walle, P. (author), Fritz, E.C. (author), van der Donck, J.C.J. (author)The Rapid Nano is a particle inspection system developed by TNO for the qualification of EUV reticle handling equipment. The detection principle of this system is dark-field microscopy. The performance of the system has been improved via model-based design. Through our model of the scattering process we identified two key components to improving...conference paper 2016
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Stegehuis, P.L. (author), Boogerd, L.S.F. (author), Inderson, A. (author), Veenendaal, R.A. (author), Bonsing, B.A. (author), Amelink, A. (author), Vahrmeijer, A.L. (author), Dijkstra, J. (author), Robinson, D.J. (author)EUS-FNA can be used for pathological confirmation of a suspicious pancreatic mass. However, performance depends on an on-site cytologist and time between punction and final pathology results can be long. SFR spectroscopy is capable of extracting biologically relevant parameters (e.g. oxygenation and blood volume) in real-time from a very small...conference paper 2016
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Hogervorst, M.A. (author), Toet, A. (author)Previously, we presented a method for applying daytime colours to fused nighttime (e.g., intensified and LWIR) imagery (Toet and Hogervorst, Opt.Eng. 51(1), 2012). Our colour mapping not only imparts a natural daylight appearance to multiband nighttime images but also enhances the contrast and visibility of otherwise obscured details. As a...conference paper 2016
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Pisano, E. (author), Silvestri, F. (author), Gerini, G. (author), Lancellotti, V. (author), Galdi, V. (author)We propose the design of a dielectric flat lens for visible wavelengths, capable of efficiently focus the incident field at a given distance. Our approach relies on the recently proposed exploitation of high-index dielectric resonators with spectrally overlapping electric and magnetic dipole resonances of equal strength. This allows the design...conference paper 2015
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Verburg, P.C. (author), Römer, G.R.B.E. (author), Huis In 'T Veld, A.J. (author)We investigated the laser-material interaction during the production of laser-induced subsurface modifications in silicon with a numerical model. Such modifications are of interest for subsurface wafer dicing. To predict the shape of these modifications, a two-temperature model and an optical model were combined. We compared the model results...article 2014
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Sanna, F. (author), Golliard, J. (author)In this study experiments are conducted on the flow within a horizontal pipe with two closed side branches of equal length. This configuration is referred to as "quasi-cross configuration" as the distance between the two closed side branches is much smaller than the acoustic wavelength of the first acoustic mode. Focus is placed upon...conference paper 2014
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Kumar, A. (author), Moet, D. (author), van der Steen, J.L. (author), Tripathi, A.K. (author), Rodriguez, F.G. (author), Maas, J. (author), Simon, M. (author), Reutten, W. (author), Douglas, A. (author), Raaijmakers, R. (author), Malinowski, P.E. (author), Myny, K. (author), Shafique, U. (author), Andriessen, R. (author), Heremans, P. (author), Gelinck, G.H. (author)We demonstrate organic imaging sensor arrays fabricated on flexible plastic foil with the solution processing route for both photodiodes and thin film transistors. We used the photovoltaic P3HT:PCBM blend for fabricating the photodiodes using spin coating and pentacene as semiconductor material for the TFTs. Photodiodes fabricated with P3HT:PCBM...conference paper 2014
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Chakkalakkal Abdulla, S.M.C. (author), Harmsma, P.J. (author), Nieuwland, R.A. (author), Pozo Torres, J.M. (author), Lemmen, M.H.J. (author), Sadeghian Marnani, H. (author), van den Berg, J.H. (author), Bodis, P. (author), Buskens, P. (author)A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded Micro Ring Resonator (MRR) on a circular diaphragm is successfully designed, fabricated and characterized. An application of pressure deflects the diaphragm, causing stress in the MRR, which elongates the waveguide length and changes the effective...conference paper 2012
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Harmsma, P. (author), Staats, J.P. (author), Lo Cascio, D.M.R. (author), Cheng, L.K. (author)The wavelength of a narrow-band optical signal can be accurately tracked by means of an interferometer having a fixed path length difference. For example, a low-cost Fiber Bragg Grating (FBG) interrogation system which tracks the FBG reflection wavelength over time can be based on such an interferometer. Alternatively, an interferometer is...conference paper 2011
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PDR status for TROPOMI, the sentinel 5 Precursor instrument for air quality and climate observationsde Vries, J. (author), Voors, R. (author), Otter, G. (author), van der Valk, N.J.C. (author), Aben, I. (author), Hoogeveen, R. (author), Snel, R. (author), Kleipool, Q. (author), Veefkind, J.P. (author)The Tropospheric Monitoring Instrument (TROPOMI) is being developed for launch in 2014 on GMES Sentinel 5 Precursor satellite. Global Monitoring for Environment and Security (GMES) is a joint initiative of the European Community (EC) and of the European Space Agency (ESA). TROPOMI is a passive sun backscatter spectrograph using the ultraviolet...conference paper 2011
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- TNO Industrie en Techniek (author), Ahlers, B. (author), Hutchinson, I. (author), Inley, R. (author) article 2008
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