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Yousefi, S.H. (author), Groenenberg, R.M. (author), Koornneef, J.M. (author), Juez-Larré, J. (author), Shahi, M. (author)Underground hydrogen storage will be an essential part of the future hydrogen infrastructure to provide flexibility and security of supply. Storage in porous reservoirs should complement storage in salt caverns to be able to meet the projected high levels of required storage capacities. To assess its techno-economic feasibility, a case study of...article 2023
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Mendrinos, D. (author), Karytsas, S. (author), Polyzou, O. (author), Karytsas, C. (author), Nordø, Å.D. (author), Midttømme, K. (author), Otto, D. (author), Gross, M. (author), Sprenkeling, M. (author), Peuchen, R. (author), Geerdink, T. (author), Puts, H. (author)The DigiMon project aims to develop and demonstrate an affordable, flexible, societally embedded, and smart digital monitoring early warning system for any subsurface CO2 storage field. The societal embeddedness level (SEL) assessment is a novel methodology which provides insight into the societal requirements for technological innovation to be...article 2022
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Barros, E.G.D. (author), Leeuwenburgh, O. (author), Szklarz, S.P. (author)We propose a quantitative model-based workflow for conformance verification of CO2 storage projects. Bayesian inference is applied to update an ensemble of simulation models that capture prior uncertainty based on mis matches with measured data. Conformance assessments are derived by comparison of updated model predictions with storage permit...article 2021
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- Piras, D. (author), van Neer, P.L.M.J. (author), Thijssen, R.M.T. (author), Sadeghian, H. (author) article 2020
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Garcia, A. Nunez (author), Boparai, H.K. (author), de Boer, C.V. (author), Chowdhury, A.I.A. (author), Kocur, C.M.D. (author), Austrins, L.M. (author), Herrera, J. (author), O'Carroll, D.M. (author)Treatment of nano zerovalent iron (nZVI) with lower valent forms of sulfur compounds (sulfidation) has the potential to increase the selectivity and reactivity of nZVI with target contaminants and to decrease inter-particle aggregation for improving its mobility. These developments help in addressing some of the long-standing challenges...article 2020
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van Neer, P.M.L.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Piras, D. (author), Duivenvoorde, T. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)The characterization of buried nanoscale structures nondestructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM was...article 2019
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van Neer, P.L.M.J. (author), van Es, M.H. (author), Piras, D. (author), Navarro, V. (author), Mohtashami, A. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)This work details the initial simulation and experimental GHz SPM work carried out at TNO.other 2019
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- van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Shoeibi Omrani, P.S. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Quesson, B.A.J. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author) other 2019
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Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author), van der Lans, M.J. (author)Scanning Probe Microscopy (SPM) has emerged as a metrology solution for the semiconductor industry enabling high throughput defect review and high resolution 3D metrology. TNO has developed a Subsurface Ultrasonic Resonant Force Microscopy (SSURFM) for non-destructive, high resolution imaging of features buried under one or more layers of...other 2019
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Piras, D. (author), Fillinger, L. (author), Rajadurai, S.R.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)In order to make stiffness based subsurface AFM a quantitative imaging modality, the experimental subsurface measurement must be interpreted with a versatile forward (and inverse) model. We have developed a fully parametric finite element model framework for the quantification of critical dimensions relevant in semicon applications. After...other 2019
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van Neer, P.L.M.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), Piras, D. (author), van der Lans, M.J. (author)GOAL: investigate feasibility of top actuated scattering based SSPM using simulations.other 2019
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van Reijzen, M.E. (author), Tamer, M.S. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Keyvani Janbahan, A. (author), Sadeghian Marnani, S. (author), van der Lans, M.J. (author)In this paper, we present an AFM based subsurface measurement technique that can be used for overlay and critical dimensions (CD) measurements through optically opaque layers. The proposed method uses the surface elasticity map to resolve the presence and geometry of subsurface structures. To improve the imaging performance of the AFM based...conference paper 2019
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- Keyvani Janbahan, A. (author), van Reijzen, M.E. (author), Tamer, M.S. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Sadeghian Marnani, S. (author), van der Lans, M.J. (author) public lecture 2019
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van Es, M.H. (author), Fillinger, L. (author), Tamer, M.S. (author), van der Lans, M.J. (author)Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important. From fundamental research into living cells structures, to process control in semiconductor manufacturing, many fields would benefit from the capability to image nanoscale structures through arbitrary ...other 2019
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van Es, M.H. (author), van Riel, M.C.J.M. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very high frequency ultrasound wave which is amplitude modulated at the sensing cantilevers resonance...other 2019
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van Es, M.H. (author), Mohtashami, A. (author), Thijssen, R.M.T. (author), Piras, D. (author), van Neer, P.L.M.J. (author), Sadeghian, H. (author)Nondestructive subsurface nanoimaging of buried nanostructures is considered to be extremely challeng- ing and is essential for the reliable manufacturing of nanotechnology products such as three-dimensional (3D) transistors, 3D NAND memory, and future quantum electronics. In scanning probe microscopy (SPM), a microcantilever with a sharp tip...article 2018
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Tamer, M.S. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increase the accuracy and the resolution, but these features are much larger than the IC feature size....conference paper 2018
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Limberger, J. (author), Boxem, T. (author), Pluymaekers, M. (author), Bruhn, D. (author), Manzella, A. (author), Calcagno, P. (author), Beekman, F. (author), Cloetingh, S. (author), van Wees, J.D. (author)In this paper we present results of a global resource assessment for geothermal energy within deep aquifers for direct heat utilization. Greenhouse heating, spatial heating, and spatial cooling are considered in this assessment. We derive subsurface temperatures from geophysical data and apply a volumetric heat-in-place method to improve current...article 2018
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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Navarro, V. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Many techniques are under development for the detection of subsurface defects or cracks. One such method is GHz subsurface probe microscopy (GHz SSPM). Here, modulated GHz elastic waves are transmitted through the bottom of a sample. The waves are scattered by buried features and detected using the probe of an atomic force microscope (AFM),...conference paper 2018
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Campbell, D. (author), de Beer, J. (author), Mielby, S. (author), van Campenhout, I. (author), van der Meulen, M. (author), Erikkson, I. (author), Ganerod, G. (author), Lawrence, D. (author), Bacic, M. (author), Donald, A. (author), Gogu, C.R. (author), Jelenek, J. (author)The European COST Sub-Urban Action (TU1206) has had the fundamental aim of closing the knowledge gap between subsurface experts and potential users of subsurface knowledge - urban decision- makers, practitioners and researchers. The Action assembled a network involving >30 countries, 23 actively participating cities, researchers, practitioners...conference paper 2017