Quantifying the performance of state of the art sensors to measure guided elastic waves

Elastic guided waves are carriers of information of the (change in) condition of plate-like structures like windturbine blades, airplane wings and road surfaces on bridges. To measure these guided waves we do not have to use piezos. Other sensors offer interesting benefits like contactless sensing, embedding, or measuring without electricity....

Refractive Index Sensing Using a Three-Port Interferometer and Comparison with Ring Resonators

In this paper, we compare ring resonator and three-port Mach-Zehnder Interferometer (MZI) devices fabricated on silicon-on-insulator for the purpose of refractive index sensing. Their respective sensitivities and limits of detection (LOD) were determined with NaCl solutions. A sensitivity of 113.07 nm per refractive index unit (RIU) and LOD of 2...

Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI

This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference...

Experimental confirmation of universal relations for microring resonators in SOI technology

We present a detailed characterization of a set of microring resonators with bent radii of 1.5 μm, fabricated in silicon-on-insulator technology. Results are in good agreement with the universal relations for coupling between microresonators and dielectric waveguides.

SOI based mechano-optical pressure sensor using a folded micro ring resonator

A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded Micro Ring Resonator (MRR) on a circular diaphragm is successfully designed, fabricated and characterized. An application of pressure deflects the diaphragm, causing stress in the MRR, which elongates the waveguide length and changes the effective...

Detection of nanobubble generation and stability by a SOI nanophotonic ring resonator

Studies on physical aspects of nanobubbles, i.e., nanoscopic soft domains at the liquid-solid interface, have been increasingly undertaken in the past few years, see [1-3] and references therein. On the technical application side, specifically in the field of micro- and nanofluidics, it has been conjectured that nanobubbles are responsible for...

Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology

Silicon-on-insulator (SOI) technology has become one of the focus platforms for photonic integrated circuits (PICs). The CMOS technology opens the possibility for reliable mass fabrication of cost-effective photonic circuits. Recently there has been a growing interest in direct optical sensing of, for example, temperature, pressure or strain,...

Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial...