Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Infiltration of trimethylaluminum (TMA) in molecular layer deposition-enabled alucone thin films on planar substrates is a common observation reported in the literature. An insufficient TMA purge time in such cases is often found to lead to a CVD component in the overall film growth due to the reactions between the outgassing TMA and the co...

Plasmonic Au islands on polymer nanopillars

The refractive index sensitivity of localized surface plasmon resonance sensors can be improved by placing the plasmonic metal particles on pillars instead of on a planar substrate. In this paper, a simple and versatile colloidal lithography method for the fabrication of plasmonic Au islands on top of polymer nanopillars is described. The pillar...