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Theelen, M. (author), Boumans, T. (author), Stegeman, F. (author), Colberts, F. (author), Illiberi, A. (author), van Berkum, J. (author), Barreau, N. (author), Vroon, Z. (author), Zeman, M. (author)Sputtered aluminum doped zinc oxide (ZnO:Al) layers on borosilicate glass were exposed to damp heat (85 C/85% relative humidity) for 2876 h to accelerate the physical and chemical degradation behavior. The ZnO:Al samples were characterized by electrical, compositional and optical measurements before and after degradation. Hall measurements show...article 2014
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Dam, V.A.T. (author), Blauw, M.A. (author), Brongersma, S.H. (author), Crego-Calama, M. (author)In this work, a room-temperature sensing device for detecting carbon monoxide using a ZnO thin film is presented. The ZnO layer (thickness close to the Debye length), which has a polycrystalline structure, is deposited with atomic-layer deposition (ALD) on an Al2O3/Si substrate. The operating principle of the sensor is based on measuring...conference paper 2011