Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(61 - 80 of 144)
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Hommen, G. (author), de Baar, M. (author), Duval, B.P. (author), Andrebe, Y. (author), Le, H.B. (author), Klop, M.A. (author), Doelman, N.J. (author), Witvoet, G. (author), Steinbuch, M. (author)A dual, high speed, real-time visible light camera setup was installed on the TCV tokamak to reconstruct optically and in real-time the plasma boundary shape. Localized light emission from the plasma boundary in tangential view, broadband visible images results in clearly resolved boundary edge-features. These projected features are detected in...article 2014
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Sadeghian Marnani, H. (author), Nulkes-de Groot, N. (author)The last four years the research Programme Optomechatronics focused on the development of new key technologies for manufacturing and testing equipment and scientific instrumentation. The challenge is to develop instruments with higher accuracy, less costs and higher throughput than we can achieve today. This is relevant for developing the next...other 2014
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), van den Dool, T.C. (author), Crowcombe, W.E. (author), Winters, J. (author), Kramers, G.F.I.J. (author)Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...conference paper 2014
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Witvoet, G. (author), de Breeje, R. (author), Nijenhuis, J.R. (author), Hazelebach, R.L.M. (author), Doelman, N.J. (author)Segmented primary mirror telescopes require dedicated piston-tip-tilt actuators for optimal optical performance. TNO has developed various prototypes of such actuators, in particular for the E-ELT. In this paper the control results of a specific two-stage prototype will be presented.conference paper 2014
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Korkiakoski, V. (author), Keller, C.U. (author), Doelman, N.J. (author), Kenworthy, M. (author), Otten, G. (author), Verhaegen, M. (author)We investigate methods to calibrate the non-common path aberrations at an adaptive optics system having a wavefront-correcting device working with an extremely high resolution (larger than 150x150 correcting elements). We use focal-plane images collected successively, the corresponding phase-diversity information and numerically efficient...conference paper 2014
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- Henken, K.R. (author), Dankelman, J. (author), van den Dobbelsteen, J.J. (author), Cheng, L.K. (author), van der Heiden, M.S. (author) article 2014
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Navarro, R. (author), Elswijk, E. (author), te Voert, M.J.A. (author), Venema, L. (author)NOVA-ASTRON has delivered a suite of cryogenic astronomical instruments for large ground based telescopes as well as space missions. The instruments include polarimeters, spectrometers, cameras and interferometers, mostly operating at infrared. Several methods have been developed to verify or measure, under cryogenic conditions, the performance...conference paper 2014
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Sheinis, A. (author), Barden, S. (author), Birchall, M. (author), Carollo, D. (author), Bland-Hawthorn, J. (author), Brzeski, J. (author), Case, S. (author), Cannon, R. (author), Churilov, V. (author), Couch, W. (author), Dean, R. (author), De Silva, G. (author), D'Orazi, V. (author), Farrell, T. (author), Fiegert, K. (author), Freeman, K. (author), Frost, G. (author), Gers, L. (author), Goodwin, M. (author), Gray, D. (author), Heald, R. (author), Heijmans, J.A.C. (author), Jones, D. (author), Keller, S. (author), Klauser, U. (author), Kondrat, Y. (author), Lawrence, J. (author), Lee, S. (author), Mali, S. (author), Martell, S. (author), Mathews, D. (author), Mayfield, D. (author), Miziarski, S. (author), Muller, R. (author), Pai, N. (author), Patterson, R. (author), Penny, E. (author), Orr, D. (author), Shortridge, K. (author), Simpson, J. (author), Smedley, S. (author), Smith, G. (author), Stafford, D. (author), Staszak, N. (author), Vuong, M. (author), Waller, L. (author), Wylie de Boer, E. (author), Xavier, P. (author), Zheng, J. (author), Zhelem, R. (author), Zucker, D. (author)The High Efficiency and Resolution Multi Element Spectrograph, HERMES is an facility-class optical spectrograph for the AAT. It is designed primarily for Galactic Archeology [21], the first major attempt to create a detailed understanding of galaxy formation and evolution by studying the history of our own galaxy, the Milky Way. The goal of the...conference paper 2014
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- Sadeghian Marnani, H. (author), van den Dool, T.C. (author) article 2014
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Korkiakoski, V. (author), Keller, C.U. (author), Doelman, N.J. (author), Kenworthy, M. (author), Otten, G.W. (author), Verhaegen, M. (author)We present two complementary algorithms suitable for using focal-plane measurements to control a wavefront corrector with an extremely high-spatial resolution. The algorithms use linear approximations to iteratively minimize the aberrations seen by the focal-plane camera. The first algorithm, Fast & Furious (FF), uses a weak-aberration...article 2014
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Herfst, R.W. (author), Klop, W.A. (author), Eschen, M. (author), van den Dool, T.C. (author), Koster, N.B. (author), Sadeghian Marnani, H. (author)Optical beam deflection (OBD) measurement method is very popular in various types of scanning probe microscopy (SPM) and micro/nanomechanical sensors to measure a mechanical motion. This paper reports the detail design and implementation of a very low drift (2 nm over 1000 s), high bandwidth (40 MHz) and low noise (15 fm/VHz) OBD measurement...article 2014
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Mora, A. (author), Biermann, M. (author), Brown, A.G.A. (author), Busonero, D. (author), Carminati, L. (author), Carrasco, J.M. (author), Chassat, F. (author), Erdmann, M. (author), Gielesen, W.L.M. (author), Jordi, C. (author), Katz, D. (author), Kohley, R. (author), Lindegren, L. (author), Loeffler, W. (author), Marchal, O. (author), Panuzzo, P. (author), Seabroke, G. (author), Sahlmann, J. (author), Serpell, E. (author), Serraller, I. (author), van Leeuwen, F. (author), van Reeven, W. (author), van den Dool, T.C. (author), Vosteen, L.L.A. (author)The Gaia payload ensures maximum passive stability using a single material, SiC, for most of its elements. Dedicated metrology instruments are, however, required to carry out two functions: monitoring the basic angle and refocusing the telescope. Two interferometers fed by the same laser are used to measure the basic angle changes at the level...conference paper 2014
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- Maas, D.J. (author), van Zwet, E.J. (author) public lecture 2014
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Maas, D.J. (author), van Zwet, E.J. (author)In lithography, overlay control is getting increasingly complex. Advanced Process Control (APC) is introduced to minimize excursions from the process window for the present exposure. APC uses metrology data of previously exposed wafers, hence, there is always a delay of tens of minutes before the required information is available. This paper...conference paper 2014
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Sadeghian Marnani, H. (author), van den Dool, T.C. (author), Crowcombe, W.E. (author), Herfstra, R.W. (author), Winters, J. (author), Kramers, G.F.I.J. (author), Koster, N.B. (author)With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...conference paper 2014
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Sadeghian Marnani, H. (author), Koster, N.B. (author), van den Dool, T.C. (author)The main driver for Semiconductor and Bio-MEMS industries is decreasing the feature size, moving from the current state-of-the-art at 22 nm towards 10 nm node. Consequently smaller defects and particles become problematic due to size and number, thus inspecting and characterizing them are very challenging. Existing industrial metrology and...conference paper 2013
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Kuiper, S. (author), van den Hof, P.M.J. (author), Schitter, G. (author)In atomic force microscopy(AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control...article 2013
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Korkiakoski, V. (author), Doelman, N.J. (author), Codona, J. (author), Kenworthy, M. (author), Otten, G. (author), Keller, C.U. (author)We present a method to calibrate a high-resolution wavefront (WF)-correcting device with a single, static camera, located in the focal-plane; no moving of any component is needed. The method is based on a localized diversity and differential optical transfer functions to compute both the phase and amplitude in the pupil plane located upstream of...article 2013
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Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.M. (author), Leinders, S.M. (author), Harmsma, P.J. (author), Tabak, E. (author), van den Dool, T.C. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)Strain gauges are widely employed in microelectromechanical systems (MEMS) for sensing of, for example, deformation, acceleration, pressure, or sound [1]. Such gauges are typically based on electronic piezoresistivity. We propose integrated optical sensors which have particular benefits: insensitivity to electromagnetic interference, no danger...conference paper 2013
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Bijster, R.J.F. (author), de Vreugd, J. (author), Sadeghian Marnani, H. (author)In this paper, an experimental-theoretical method is proposed to accurately determine the thermal diffusivity, characteristic time constant and layer thicknesses of a bimaterial cantilever using a transient, non-destructive and noncontact measurement. The technique is based on the wellknown optical beam deflection method. A time dependent,...conference paper 2013
Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(61 - 80 of 144)