Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(41 - 60 of 144)
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Page, M.A. (author), Zhao, C. (author), Blair, D.G. (author), Ju, L. (author), Ma, Y. (author), Pan, H.W. (author), Chao, S. (author), Mitrofanov, V.P. (author), Sadeghian Marnani, H. (author)Thermal noise generally greatly exceeds quantum noise in optomechanical devices unless the mechanical frequency is very high or the thermodynamic temperature is very low. This paper addresses the design concept for a novel optomechanical device capable of ultrahigh quality factors in the audio frequency band with negligible thermal noise. The...article 2016
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Witvoet, G. (author), Doelman, N.J. (author), den Breeje, R. (author)Future large telescopes, such as E-ELT and TMT, will need feedback control of the thousands of actuators underneath their segmented primary mirrors (M1). Differences in actuator dynamics and spatially and temporally changing disturbances make it extremely diffcult to formulate classical controllers which are both suffciently robust and highly...conference paper 2016
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Klop, W.A. (author), Verlaan, A.L. (author)The CHEOPS mission (CHaracterising ExOPlanet Satellite) is dedicated to searching for exoplanetary transits by performing ultra-high precision photometry on bright stars already known to host planets. A 32cm diameter on-axis Ritchey-Chrétien telescope is used for imaging onto a single cooled detector. With integration times up to 48 hours the...conference paper 2016
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Kuiper, S. (author), Doelman, N.J. (author), Nieuwkoop, E. (author), Overtoom, A.J. (author), Russchenberg, T. (author), van Riel, M.C.J.M. (author), Wildschut, J.A. (author), Baeten, M.J.J. (author), Human, J.D. (author), Spruit, W.E.T. (author), Brinkers, S. (author), Maniscalco, M.P. (author)Over the last decade TNO has developed a deformable mirror concept using electromagnetic actuators with the main advantages of having very low non-linearity and hysteresis, low power consumption, and high inherent reliability of the actuators. TNO recently started a program to redesign the electromagnetic actuator to improve the actuator...conference paper 2016
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Bos, A. (author), Henselmans, R. (author), Rosielle, P.C.J.N. (author), Steinbuch, M. (author)To enable important scientific discoveries, ESO has defined a new ground-based telescope: the European Extremely Large Telescope (E-ELT). The baseline design features a telescope with a 39-m-class primary mirror (M1), making it the largest and most powerful telescope in the world. The M1 consists of 798 hexagonal segments, each about 1.4 m wide,...article 2015
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Sadeghian Marnani, H. (author), Dekker, A. (author), Herfst, R.W. (author), Winters, J. (author), Eigenraam, A.B.C. (author), Rijnbeek, R.A. (author), Nulkes, N. (author)With the device dimensions moving towards the 1X node and below, the semiconductor industry is rapidly approaching the point where existing metrology, inspection and review tools face huge challenges in terms of resolution, the ability to resolve 3D and the throughput. Due to the advantages of sub-nanometer resolution and the ability of true 3D...conference paper 2015
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Maas, D.J. (author), Fliervoet, T. (author), Herfst, R.W. (author), van Veldhoven, E. (author), Meessen, J. (author), Vaenkatesan, V. (author), Sadeghian Marnani, H. (author)With lithographic patterning dimensions decreasing well below 50 nm, it is of high importance to understand metrology at such small scales. This paper presents results obtained from dense arrays of contact holes (CHs) with various Critical Dimension (CD) between 15 and 50 nm, as patterned in a chemically amplified resist using an ASML EUV...article 2015
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Bergmans, R.H. (author), Nieuwenkamp, H.J. (author), Kok, G.J.P. (author), Blobel, G. (author), Nouira, H. (author), Küng, A. (author), Baas, M. (author), te Voert, M.J.A. (author), Baer, G. (author), Stuerwald, S. (author)A comparison of topography measurements of aspherical surfaces was carried out by European metrology institutes, other research institutes and a company as part of an European metrology research project. In this paper the results of this comparison are presented. Two artefacts were circulated, a small polymer coated aspherical lens with a clear...article 2015
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van Baars, G. (author), Smeltink, J. (author), van der Werff, J. (author), Limpens, M. (author), Barink, M. (author), van den Berg, D. (author), de Vreugd, J. (author), Witvoet, G. (author), Galaktionov, O.S. (author)This article presents developments of freeform mechatronics concepts, enabled by industrial Additive Manufacturing (AM), aiming at breakthroughs for precision engineering challenges such as lightweight, advanced thermal control, and integrated design. To assess potential impact in future applications, representative cases have been considered....conference paper 2015
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Witvoet, G. (author), Human, J.D. (author)An active mirror mechanism to correct for seasonal alignment errors of the evolved Laser Interferometer Space Antenna (eLISA), a future ESA space mission meant to accurately detect gravitational waves, has been designed, realised and tested by TNO. The mechanism is supposed to move ±2.5° in a whole year with extreme accuracy. The design utilises...article 2015
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), Winters, J. (author), Crowcombe, W.E. (author), Kramer, G.F.I. (author), van den Dool, T.C. (author), van Es, M.H. (author)We have developed a high speed, miniature scanning probe microscope (MSPM) integrated with a Positioning Unit (PU) for accurately positioning the MSPM on a large substrate. This combination enables simultaneous, parallel operation of many units on a large sample for high throughput measurements. The size of the MSPM is 19 × 45 × 70 mm3. It...article 2015
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Sadeghian Marnani, H. (author), van den Dool, T.C. (author), Uziel, Y. (author), Bar Or, R. (author)This paper aims at unraveling the mystery of damage in high speed AFMs for 1X node and below. With the device dimensions moving towards the 1X node and below, the semiconductor industry is rapidly approaching the point where existing metrology, inspection and review tools face huge challenges in terms of resolution, the ability to resolve 3D,...conference paper 2015
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Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Goosen, H. (author), van Keulen, F. (author)The maximum amount of repulsive force applied to the surface plays a very important role in damage of tip or sample in Atomic Force Microscopy(AFM). So far, many investigations have focused on peak repulsive forces in tapping mode AFM in steady state conditions. However, it is known that AFM could be more damaging in transient conditions. In...conference paper 2015
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Witvoet, G. (author), den Breeje, R. (author), Nijenhuis, J.R. (author), Doelman, N.J. (author)Controller design based on dynamic analysis proves compliant performance of highly accurate actuators for piston-tip-tilt correction of primary mirror segments for the European Extremely Large Telescope.article 2015
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Herfst, R.W. (author), Dekker, A. (author), Witvoet, G. (author), Crowcombe, W.E. (author), de Lange, T.J. (author), Sadeghian Marnani, H. (author)One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM...article 2015
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Bos, A. (author), Henselmans, R. (author), Rosielle, N. (author), Steinbuch, M. (author)EXTREMELY LARGE TELESCOPES. The planned extremely large telescope observatories with segmented giant primary mirrors will require metrology with nanometer accuracy. The two extremely large ground telescopes, the European Extremely Large Telescope (E-ELT [2]) and Thirty Meter Telescope (TMT [3]), feature telescopes with 39 meter and 30 meter...conference paper 2015
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Bos, A. (author), Henselmans, R. (author), Rosielle, P.C.J.N. (author), Steinbuch, M. (author), te Voert, M.J.A. (author)The baseline design of the European Extremely Large Telescope features a telescope with a 39-meter-class primary mirror (M1), consisting of 798 hexagonal segments. A measurement machine design is presented based on a non-contact single-point scanning technique, capable of measuring the form error of each segment with nanometer uncertainty, fast,...conference paper 2014
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Witvoet, G. (author), den Breeje, R. (author), Nijenhuis, J.R. (author), Hazelebach, R.L.M. (author), Doelman, N.J. (author)Segmented primary mirror telescopes require dedicated piston-tip-tilt actuators for optimal optical performance. Netherlands Organisation for Applied Scientific Research (TNO) has developed various prototypes of such actuators, in particular for the E-ELT. This paper presents the dynamics analysis and feedback control results for a specific two...article 2014
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Bijster, R.J.F. (author), de Vreugd, J. (author), Sadeghian Marnani, H. (author)In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot...article 2014
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te Voert, M.J. (author), van Brakel, R. (author), Witvoet, G. (author)Thermal and opto-mechanical design and analysis work has been done on the Tropospheric Monitoring Instrument (TROPOMI), a spectrometer on the Copernicus Sentinel 5 Precursor satellite. To verify compliance with the stringent opto-mechanical stability requirements, detailed thermal and thermo-mechanical simulations were performed to assess the...article 2014
Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(41 - 60 of 144)