Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(21 - 40 of 144)
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Navarro, V. (author), van Spronsen, M.A. (author), Frenken, J.W.M. (author)Fischer-Tropsch synthesis is a heterogeneous catalytic reaction that creates approximately 2% of the world's fuel. It involves the synthesis of linear hydrocarbon molecules from a gaseous mixture of carbon monoxide and hydrogen at high pressures (from a few to tens of bars) and high temperatures (200-350 €...°C). To gain further insight into the...article 2016
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van der Donck, J.C.J. (author), Bussink, P.G.W. (author), Fritz, E.C. (author), van der Walle, P. (author)Cleanliness is a prerequisite for obtaining economically feasible yield levels in the semiconductor industry. For the next generation of lithographic equipment, EUV lithography, the size of yield-loss inducing particles for the masks will be smaller than 20 nm. Consequently, equipment for handling EUV masks should not add particles larger than...article 2016
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Heijmans, J.A.C. (author)On 15 September 2016, ESA released the data of the first 1,000 days of measurements from the Gaia mission. The large data package included 1.1 billion star positions, motions, brightness values and more, as well as surprises such as supernova detections. Thanks in part to the accurate space interferometer BAM developed by TNO.article 2016
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Nijenhuis, J.R. (author), Braam, B.C. (author), Hamelinck, R.F.M.M. (author)The mirror segments for the E-ELT and TLT are nearly equal in size and shape (hexagonal, 1.2 m over flat sides). They are very thin (about 50 mm) compared to their size. Supporting these mirrors and obtaining high optical performance is a challenge from design and manufacturing point of view. TNO has designed and build (together with VDL-ETG)...conference paper 2016
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Silvestri, F. (author), Gerini, G. (author), Bäumer, S.M.B. (author), van Zwet, E.J. (author)In this paper, we present a design strategy for single layer metasurface lenses based on dielectric resonators. This strategy is based on a robust optimization procedure for the resonator distribution in order to meet required performances (e.g. encircled energy, bandwidth, field of view, etc.). Possible deviations due to manufacturing errors are...article 2016
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Eijk, A. (author), de Lange, T.J. (author), de Vreugd, J. (author), Slis, E.J.P. (author)Reciprocating compressors generate vibrations caused by pulsation-induced forces, mechanical (unbalanced) free forces and moments, crosshead guide forces and cylinder stretch forces. The traditional way of mitigating the vibration and cyclic stress levels to avoid fatigue failure of parts of the reciprocating compressor system (piping,...conference paper 2016
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Huisman, R. (author), Paalvast, S. (author), Brandl, B.R. (author), van den Dool, T.C. (author), Eggens, M. (author), Janssen, H. (author), Aitink-Kroes, G. (author), Molster, F. (author), Teuwen, M. (author), Venema, L. (author), Jayawardhana, B. (author)We present the main results of the performance test campaign of the Mid-Infrared European Extremely Large Telescope Imager and Spectrograph (METIS) Cold Chopper Demonstrator (MCCD). This tip/tilt mirror, which operates at a temperature of 77 K, is one of the critical components in the METIS for the European Extremely Large Telescope. The...article 2016
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te Sligte, E. (author), Koster, N.B. (author), Molkenboer, F.T. (author), van der Walle, P. (author), Muilwijk, P.M. (author), Mulckhuyse, W.F.W. (author), Oostdijck, B.W. (author), Hollemans, C.L. (author), Nijland, B.A.H. (author), Kerkhof, P.J. (author), van Putten, M. (author), Hoogstrate, A.M. (author), Deutz, A.F. (author)TNO is building EBL2: a laboratory EUV exposure system capable of operating at high broad band EUV powers and intensities, in which XPS analysis of exposed samples is possible without breaking vacuum. Its goal is to accelerate the development and testing of EUV optics and components by providing a publicly accessible exposure and analysis...conference paper 2016
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Keyvani, A. (author), Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author)In this paper we present a new AFM based nano-patterning technique that can be used for fast defect repairing of high resolution photomasks and possibly other high-speed nano-patterning applications. The proposed method works based on hammering the sample with tapping mode AFM followed by wet cleaning of the residuals. On the area where a...conference paper 2016
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Kuiper, S. (author), Fritz, E.C. (author), Crowcombe, W.E. (author), Liebig, T. (author), Kramer, G.F.I. (author), Witvoet, G. (author), Duivenvoorde, T. (author), Overtoom, A.J. (author), Rijnbeek, R.A. (author), van Zwet, E.J. (author), van Dijsseldonk, A. (author), den Boef, A. (author), Beems, M. (author), Levasier, L. (author)Nowadays most overlay metrology tools assess the overlay performance based on marker features which are deposited next to the functional device features within each layer of the semiconductor device. However, correct overlay of the relatively coarse marker features does not directly guarantee correct overlay of the much smaller device features....conference paper 2016
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van Es, M.H. (author), Sadeghian Marnani, H. (author)Inspection of EUV mask substrates and blanks is demanding. We envision this is a good target application for massively parallel Atomic Force Microscopy (AFM). We envision to do a full surface characterization of EUV masks with AFM enabling 1nm true 3D resolution over the entire surface. The limiting factor to do this is in the sensor itself:...conference paper 2016
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Kasparek, W. (author), Doelman, N.J. (author), Stober, J. (author), Maraschek, M. (author), Zohm, H. (author), Monaco, F. (author), Eixenberger, H. (author), Klop, W.A. (author), Wagner, D. (author), Schubert, M. (author), Schütz, H. (author), Grünwald, G. (author), Plaum, B. (author), Munk, R. (author), Schlüter, K.H. (author)At the tokamak ASDEX Upgrade, experiments to stabilize neoclassical tearing modes (NTMs) by electron cyclotron (EC) heating and current drive in the O-points of the magnetic islands were performed. For the rst time, injection into the O-points of the revolving islands was performed via a fast directional switch, which toggled the EC power...article 2016
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Heijmans, J.A.C. (author), Nijenhuis, J.R. (author), Bos, A. (author)The E-ELT is the European Extremely Large Telescope with a primary mirror of 39 meters that is being developed by ESO for the European astronomical community and ESO members. For the realisation of the E-ELT, TNO Space and Scientific Instrumentation proposes several technical contributions. These are, among others, the mirror support structure,...article 2016
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Witvoet, G. (author), Human, J.D. (author), Maniscalco, M.P. (author)An active tilt mirror mechanism, meant for correction of the constellation breathing of the evolved Laser Interferometer Space Antenna, has been designed and realized. Its open-loop performance has been characterized in both time and frequency domain. Based on this, a feedback controller has been designed and the resulting closed-loop...conference paper 2016
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Doelman, N.J. (author), Osborn, J. (author)There is a strong need to model the temporal fluctuations in turbulence parameters, for instance for scheduling, simulation and prediction purposes. This paper aims at modelling the dynamic behaviour of the turbulence coherence length r0, utilising measurement data from the Stereo-SCIDAR instrument installed at the Isaac Newton Telescope at La...conference paper 2016
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Lasnier, C.J. (author), McLean, A.G. (author), Gattuso, A. (author), O'Neill, R. (author), Smiley, M. (author), Vasquez, J. (author), Feder, R. (author), Smith, M. (author), Stratton, B. (author), Johnson, D. (author), Verlaan, A.L. (author), Heijmans, J.A.C. (author)The Upper Wide Angle Viewing System (UWAVS) will be installed on five upper ports of ITER. This paper shows major requirements, gives an overview of the preliminary design with reasons for some design choices, examines self-emitted IR light from UWAVS optics and its effect on accuracy, and shows calculations of signal-to-noise ratios for the two...conference paper 2016
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Bos, A. (author), Witvoet, G. (author), Pereboom, H.P. (author), Steinbuch, M. (author)The Auto-collimating Flat Mirror Assembly (AFMA) simulated the rotation of the Gaia satellite around its vertical axis. As such, it was one of the most important ground support equipment tools to test the payload performance of the Gaia mission. Although the performance of TNO's design during commissioning was excellent, one of the challenges of...conference paper 2016
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Nijenhuis, J.R. (author), Heijmans, J.A.C. (author), de Breeje, R. (author), Hazelebach, R.L.M. (author), de Vreugd, J. (author), Crowcombe, W.E. (author), Naron, D.J. (author), Fritz, E.C. (author), Borghi, G. (author), Navarro, R. (author), Sillari, L. (author), Sambenedetto, E. (author), Eder, J. (author), Kamphues, F.G. (author)Described is the M1 segment support, as designed by TNO in the period 2015- 2016. The design has significantly changed and improved compared to the earlier designs. During the period 2009-2010 prototypes for the primary mirror support of the E-ELT have been developed. These have been extensively tested by ESO. Design improvement were found to be...conference paper 2016
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Buis, E.J. (author), Doppenberg, E.J.J. (author), Lahmann, R. (author), Toet, P.M. (author), de Vreugd, J. (author)Cosmic neutrinos with ultra high energies can be detected acoustically using hydrophones. The detection of these neutrinos may provide crucial information about then GZK mechanism. The flux of these neutrinos, however, is expected to be low, so that a detection volume is required more than a order of magnitude larger than what has presently been...conference paper 2016
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, F. (author)Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...conference paper 2016
Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
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