Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
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van Es, M.H. (author), Mohtashami, A. (author), Thijssen, R.M.T. (author), Piras, D. (author), van Neer, P.L.M.J. (author), Sadeghian, H. (author)
Nondestructive subsurface nanoimaging of buried nanostructures is considered to be extremely challeng- ing and is essential for the reliable manufacturing of nanotechnology products such as three-dimensional (3D) transistors, 3D NAND memory, and future quantum electronics. In scanning probe microscopy (SPM), a microcantilever with a sharp tip...
article 2018
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van Neer, P.L.M.J. (author), Piras, D. (author), Koek, W. (author), van Zwet, E. (author), Sadeghian, H. (author)
conference paper 2017
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Buis, E.J. (author), Doppenberg, E.J.J. (author), Lahmann, R. (author), Toet, P.M. (author)
The scientific prospects of detecting neutrinos with an energy close or even higher than the GKZ cut-off energy has been discussed extensively in literature. It is clear that due to their expected low flux,the detection of these ultra-high energy neutrinos (Eν > 1018 eV) requires a telescope larger than 100km3. Acoustic detection may provide a way...
conference paper 2017
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Bremmer, G.M. (author), Zacharaki, E. (author), Sjåstad, A.O. (author), Navarro, V. (author), Frenken, J.W.M. (author), Kooyman, P.J. (author)
Using a MEMS nanoreactor in combination with a specially designed in situ Transmission Electron Microscope (TEM) holder and gas supply system, we imaged the formation of multiple layers of graphene encapsulating a cobalt nanoparticle, at 1 bar CO:N2 (1:1) and 500 °C. The cobalt nanoparticle was imaged live in a TEM during the Boudouard reaction....
article 2017
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Kuiper, S. (author), Doelman, N.J. (author), Overtoom, T. (author), Nieuwkoop, E. (author), Russchenberg, T. (author), van Riel, M.J.C.M. (author), Wildschut, J.A. (author), Baeten, M.J.J. (author), Spruit, W.E.T. (author), Brinkers, S. (author), Human, J.D. (author)
To increase the collecting power and to improve the angular imaging resolution, space telescopes are evolving towards larger primary mirrors. The aerial density of the telescope mirrors needs to be kept low, however, to be compatible with the launch requirements. A light-weight (primary) mirror will introduce additional optical aberrations to...
conference paper 2017
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), Dekker, A. (author), Winters, J. (author), Bijnagte, A.A. (author), Rijnbeek, R.A. (author)
Atomic force microscopy (AFM) is an essential nanoinstrument technique for several applications such as cell biology and nanoelectronics metrology and inspection. The need for statistically significant sample sizes means that data collection can be an extremely lengthy process in AFM. The use of a single AFM instrument is known for its very low...
article 2017
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Herfst, R.W. (author), Bijster, R.J.F. (author), Dekker, A. (author), Wei, J. (author), van Zeijl, H.W. (author), Kruidhof, R. (author), Sadeghian Marnani, H. (author)
High resolution and high throughput imaging are typically mutually exclusive. While there is a wide range of techniques to image features beyond the diffraction limit of light, they all have their own benefits and drawbacks, but they are often very slow compared to optical systems. As such, extending the performance of optical microscopes...
conference paper 2017
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van Kooten, M. (author), Doelman, N.J. (author), Kenworthy, M. (author)
Current high contrast imaging systems are limited at small angular separations, preventing the direct imaging of Earth-size exoplanets close to their host stars. One primary cause of this is the performance of the extreme adaptive optics (AO) system which is dominated by the servo-lag error at small angular separations. Prediction can be used to...
conference paper 2017
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van Neer, P.L.M.J. (author), Piras, D. (author), Koek, W. (author), van Zwet, E. (author), Marnani, H.S. (author)
conference paper 2017
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Alberti, S. (author), Genoud, J. (author), Goodman, T. (author), Hogge, J.P. (author), Porte, L. (author), Silva, M. (author), Tran, T.M. (author), Tran, M.Q. (author), Avramidis, K. (author), Pagonakis, I. (author), Jin, J. (author), Illy, S. (author), Gantenbein, G. (author), Jelonnek, J. (author), Thumm, M. (author), Bin, W. (author), Bruschi, A. (author), Garavaglia, S. (author), Moro, A. (author), Kasparek, W. (author), Legrand, F. (author), Perial, E. (author), Rozier, Y. (author), Cismondi, F. (author), Doelman, N.J. (author)
conference paper 2017
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Sadeghian Marnani, H. (author), Bijnagte, A.A. (author), Herfst, R.W. (author), Kramer, G.F.IJ. (author), Kramer, L. (author), Dekker, A. (author)
In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time consuming, and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability...
article 2017
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Mohtashami, A. (author), Navarro, V. (author), Sadeghian Marnani, H. (author), Englard, I. (author), Shemesh, D. (author), Malik, N.S. (author)
conference paper 2017
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Sadeghian Marnani, H. (author), Paul, P.C. (author), Herfst, R.W. (author), Dekker, A. (author), Winters, J. (author), Maturova, K. (author)
Scanning Probe microscope (SPM) is an important nanoinstrument for several applications such as bioresearch, metrology, inspection and nanopatterning. Single SPM is associated with relatively slow rate of scanning and low throughput measurement, thus not being suitable for scanning large samples such as semiconductor wafers and photolithography...
conference paper 2017
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van der Kolk, M. (author), van der Veen, G.J. (author), de Vreugd, J. (author), Langelaar, M. (author)
The design of high performance instruments often involves the attenuation of poorly damped resonant modes. Current design practices typically rely on informed trial and error based modifications to improve dynamic performance. In this article, a multi-material topology optimization approach is presented as a systematic methodology to develop...
article 2017
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Koster, N.B. (author), te Sligte, E. (author), Molkenboer, F.T. (author), Deutz, A.F. (author), van der Walle, P. (author), Muilwijk, P.M. (author), Mulckhuyse, W.F.W. (author), Oostdijck, B.W. (author), Hollemans, C.L. (author), Nijland, B.A.H. (author), Kerkhof, P.J. (author), van Putten, M. (author), Westerhout, J. (author)
TNO is building EBL2 as a publicly accessible test facility for EUV lithography related development of photomasks, pellicles, optics, and other components requiring EUV exposure. EBL2 consists of a EUV Beam Line, a XPS system, and sample handling infrastructure. Recently we finished installation of the source, exposure chamber, handlers and XPS...
conference paper 2017
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By end of 2017 there will be more than 8.4 billion connected devices (Gartner 2017). This means for the first time, Internet of Things (IoT) devices will outnumber the world’s population. In 2020, the number of connected devices will increase to more than 20 billion. This means nearly every devices we own or can imagine will be connected to the...
conference paper 2017
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Snel, R. (author), Winters, J. (author), Liebig, T. (author), Jonker, W.A. (author)
Contemporary production systems of mechanical precision parts show challenges as increased complexity, tolerances shrinking to sub-microns and yield losses that must be mastered to the extreme. More advanced automation and process control is required to accomplish this task. Often a solution based on feedforward/feedback control is chosen...
conference paper 2017
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Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Tamer, M.S. (author), Goosen, J.F.L. (author), van Keulen, F. (author)
Due to the harmonic motion of the cantilever in Tapping Mode Atomic Force Microscopy, it is seemingly impossible to estimate the tip-sample interactions from the motion of the cantilever. Not directly observing the interaction force, it is possible to damage the surface or the tip by applying an excessive mechanical load. The tip-sample...
article 2017
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Piras, D. (author), Sadeghian Marnani, H. (author)
Ultrasound atomic force microscopy (US-AFM) has been used for subsurface imaging of nanostructures. The contact stiffness variations have been suggested as the origin of the image contrast. Therefore, to analyze the image contrast, the local changes in the contact stiffness due to the presence of subsurface features should be calculated. So far,...
article 2017
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Molkenboer, F.T. (author)
EBL2 is not a setup for producing semiconductor devices. The experiments for which EBL2 is intended are: accelerated lifetime tests for EUV Mirrors; EUV Reticles and pellicles; and Materials used in EUV lithography. This kind of research is needed due to the harsh EUV environment, and EUV lithography is coming to market. EBL2 is able to...
public lecture 2017
Searched for: subject%3A%22OM%255C%2B%255C-%255C%2BOpto%255C-Mechatronics%22
(1 - 20 of 144)

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