Highly sensitive miniature fluidic flowmeter based on an FBG heated by Co2+-doped fiber

In this paper, we present a miniature fluidic flow sensor based on a short fiber Bragg grating inscribed in a single mode fiber and heated by Co2+-doped multimode fibers. The proposed flow sensor was employed to measure the flow rates of oil and water, showing good sensitivity of 0.339 nm/(m/s) and 0.578 nm/(m/s) for water and oil, flowing at v ...

Deflecting superstrate solutions for wide-scanning array

Design considerations on a wide-scanning array antenna for on-craft satellite communications are presented in this paper. For this type of application, a scanning coverage of 80° over a 15% fractional bandwidth in Ka-band is required. A solution based on a passive superstrate illuminated by a phased array is recognized as the most encouraging....

Miniature FBG-based fluidic flowmeter to measure hot oil and water

In this paper, we present a miniature fluidic flowmeter based on a packaged FBG and laser-heated fibers. The flow rates of water and hydraulic oil were measured by utilizing the proposed flowmeter. The measured results exhibited good sensitivity of 0.339 nm/(m/s) for water and 0.578 nm/(m/s) for oil flow. Experimental results showed that the...

Mini plasma cleaner

Towards a contamination-tolerant EUV power sensor

In EUV Lithography short-, mid- and long-term control over in-band EUV power is needed for high-yield IC production. Existing sensors can be unstable over time due to contamination and/or degradation. TNO goal: to conceive a stable EUV power sensor. Sensitive to in-band EUV, negligible degradation, insensitive to out-of-band EUV, insensitive to...