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Navarro, V. (author), Mohtashami, A. (author), Herfst, R.W. (author), Maturova, K. (author), van Es, M.H. (author), Piras, D. (author), Sadeghian Marnani, H. (author)As the pitch approaches the 10nm node, in order to meet current and future patterning challenges, high resolution techniques are required, complementary to extreme ultraviolet lithography (EUVL) for high volume manufacturing of nanodevices. These complementary techniques should have the following specifications: 1) High patterning resolution,...conference paper 2018
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Yang, G. (author), Guo, P. (author), Procel, P. (author), Weber, A.W. (author), Isabella, O. (author)The poly-Si carrier-selective passivating contacts (CSPCs) parasitically absorb a substantial amount of light, especially in the form of free carrier absorption. To minimize these losses, we developed CSPCs based on oxygen-alloyed poly-Si (poly-SiOx) and deployed them in c-Si solar cells. Transmission electron microscopy analysis indicates the...article 2018
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van Groenestijn, G.J.A. (author), Meulendiiks, N.M.M. (author), Volker, A.W.F. (author), van Neer, P.L.M.J. (author), Buskens, P.J.P. (author)Nanoparticles are applied in an increasing number of products (e.g. medicine, food and cosmetics). There is a need to real-time monitor the growth of nanoparticles during production inside the chemical reactor. However, standard particle sizing methods such as dynamic light scattering (DLS) and transmission electron microscopy (TEM) cannot do...conference paper 2018
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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Navarro, V. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Many techniques are under development for the detection of subsurface defects or cracks. One such method is GHz subsurface probe microscopy (GHz SSPM). Here, modulated GHz elastic waves are transmitted through the bottom of a sample. The waves are scattered by buried features and detected using the probe of an atomic force microscope (AFM),...conference paper 2018
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Markus, A.A. (author), Krystek, P. (author), Tromp, P.C. (author), Parsons, J.R. (author), Roex, E.W.M. (author), de Voogt, P. (author), Laane, R.W.P.M. (author)We investigated the occurrence of metal-based nanoparticles in a natural system, the river Dommel in the Netherlands. The river itself is well-studied as far as hydrology and water quality is concerned, easily accessible and contains one major wastewater treatment plant discharging onto this river. We sampled water from various locations along...article 2018
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Zhao, D. (author), Lenz, T. (author), Katsouras, I. (author), Blom, P.W.M. (author), de Leeuw, D.M. (author)In this work, the macroscopic polarization of a ferroelectric capacitor is correlated with the local domain morphology. To this end, a ferroelectric capacitor of the random copolymer poly(vinylidenefluoride-trifluoroethylene) [P(VDF-TrFE)] is poled to a set polarization state in a Sawyer-Tower setup. After chemically removing the top electrode,...article 2017
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Tromp, P.C. (author), Kuijpers, E. (author), Bekker, C. (author), Godderis, L. (author), Lan, Q. (author), Jedynska, A.D. (author), Vermeulen, R. (author), Pronk, A. (author)To date there is no consensus about the most appropriate analytical method for measuring carbon nanotubes (CNTs), hampering the assessment and limiting the comparison of data. The goal of this study is to develop an approach for the assessment of the level and nature of inhalable multi-wall CNTs (MWCNTs) in an actual workplace setting by...article 2017
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Sadeghian Marnani, H. (author), Bijnagte, A.A. (author), Herfst, R.W. (author), Kramer, G.F.IJ. (author), Kramer, L. (author), Dekker, A. (author)In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time consuming, and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability...article 2017
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- Mohtashami, A. (author), Navarro, V. (author), Sadeghian Marnani, H. (author), Englard, I. (author), Shemesh, D. (author), Malik, N.S. (author) conference paper 2017
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Erkens, I.J.M. (author), Verheijen, M.A. (author), Knoops, H.C.M. (author), Keuning, W. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)To date, conventional thermal atomic layer deposition (ALD) has been the method of choice to deposit high-quality Pt thin films grown typically from (MeCp)PtMe3 vapor and O2 gas at 300 °C. Plasma-assisted ALD of Pt using O2 plasma can offer several advantages over thermal ALD, such as faster nucleation and deposition at lower temperatures. In...article 2017
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Keyvani Janbahan, A. (author), Alijani, F. (author), Sadeghian Marnani, H. (author), Maturova, K. (author), Goosen, H. (author), van Keulen, F. (author)This paper investigates the closed-loop dynamics of the Tapping Mode Atomic Force Microscopy using a new mathematical model based on the averaging method in Cartesian coordinates. Experimental and numerical observations show that the emergence of chaos in conventional tapping mode AFM strictly limits the imaging speed. We show that, if the...article 2017
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Lenz, T. (author), Hummel, R. (author), Katsouras, I. (author), Groen, W.A. (author), Nijemeisland, M. (author), Ruemmler, R. (author), Schäfer, M.K.E. (author), de Leeuw, D.M. (author)Recently reported piezoresponse force microscopy (PFM) measurements have proposed that porcine aortic walls are ferroelectric. This finding may have great implications for understanding biophysical properties of cardiovascular diseases such as arteriosclerosis. However, the complex anatomical structure of the aortic wall with different...article 2017
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van der Walle, P. (author), Kramer, E. (author), van der Donck, J.C.J. (author), Mulckhuyse, W.F.W. (author), Nijsten, L. (author), Bernal Arango, F.A. (author), de Jong, A. (author), van Zeijl, E. (author), Spruit, W.E.T. (author), van den Berg, J.H. (author), Nanda, G. (author), van Langen-Suurling, A.K. (author), Alkemade, P.F.A. (author), Pereira, S.F. (author), Maas, D.J. (author)Particle defects are important contributors to yield loss in semi-conductor manufacturing. Particles need to be detected and characterized in order to determine and eliminate their root cause. We have conceived a process flow for advanced defect classification (ADC) that distinguishes three consecutive steps; detection, review and classification...conference paper 2017
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di Benedetto, G.L. (author), van Ramshorst, M.C.J. (author), Duvalois, W. (author), Hooijmeijer, P.A. (author), van der Heijden, A.E.D.M. (author)A tensile module system placed within a Scanning Electron Microscope (SEM) was utilized to conduct insitu tensile testing of propellant samples. The tensile module system allows for real-time in-situ SEM analysis of the samples to determine the failure mechanism of the propellant material under tensile force. The focus of this study was to vary...article 2017
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van den Elshout, J.J.M.H. (author), Duvalois, W. (author), Di Benedetto, G.L. (author), Bouma, R.H.B. (author), van der Heijden, A.E.D.M. (author)A key-technique for the research of energetic materials is scanning electron microscopy. In this paper several examples are given of characterization studies on energetic materials, including a solid composite propellant formulation. Results of the characterization of energetic materials using scanning electron microscopy comprise the...conference paper 2016
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Segers, F.J.J. (author), van Laarhoven, K.A. (author), Huinink, H.P. (author), Adan, O.C.G. (author), Wösten, H.A.B. (author), Dijksterhuis, J. (author)Indoor fungi cause damage in houses and are a potential threat to human health. Indoor fungal growth requires water, for which the terms water activity (aw) and relative humidity (RH) are used. The ability of the fungi Aspergillus niger, Cladosporium halotolerans, and Penicillium rubens at different developmental stages to survive changes in aw...article 2016
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Bussink, P.G.W. (author), Volatier, J.B. (author), van der Walle, P. (author), Fritz, E.C. (author), van der Donck, J.C.J. (author)The Rapid Nano is a particle inspection system developed by TNO for the qualification of EUV reticle handling equipment. The detection principle of this system is dark-field microscopy. The performance of the system has been improved via model-based design. Through our model of the scattering process we identified two key components to improving...conference paper 2016
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van der Heijden, A.E.D.M. (author), Bouma, R.H.B. (author)The influence of an explosion-driven deformation on the defect structure in RDX crystals embedded in a polymer-bonded explosive was investigated by means of confocal scanning laser microscopy. The images were compared to the defect structure in the as-received RDX grades, embeddedarticle 2016
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Keyvani, A. (author), Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author)In this paper we present a new AFM based nano-patterning technique that can be used for fast defect repairing of high resolution photomasks and possibly other high-speed nano-patterning applications. The proposed method works based on hammering the sample with tapping mode AFM followed by wet cleaning of the residuals. On the area where a...conference paper 2016
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Fransman, W. (author), Bekker, C. (author), Tromp, P. (author), Duis, W.B. (author)Increasing production and applications of manufactured nano objects (MNOs) have become a source for human exposure and therefore raise concerns and questions about the possible health effects. In this study, the potential release of nano objects, their agglomerates, and aggregates (NOAA) as a result of sanding of hardwood treated with MNOs...article 2016