Searched for: subject%3A%22Metal%255C%2Binsulator%255C%2Bmetals%22
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Papadopoulos, N. (author), Steudel, S. (author), Kronemeijer, A.J. (author), Ameys, M. (author), Myny, K. (author)
conference paper 2019
Tang, Y. (author), Xi, Z. (author), Xu, M. (author), Bäumer, S.M.B. (author), Adam, A.J.L. (author), Urbach, H.P. (author)
Hyperbolic metamaterials (HMMs) are anisotropic materials with a permittivity tensor that has both positive and negative eigenvalues. Here we report that by using a type II HMM as a cladding material, a waveguide that only supports higher-order modes can be achieved, while the lower-order modes become leaky and are absorbed in the HMM cladding....
article 2016
Matters-Kammerer, M.K. (author), Jinesh, K.B. (author), Rijks, T.G.S.M. (author), Roozeboom, F. (author), Klootwijk, J.H. (author)
A detailed electrical analysis of multiple layer trench capacitors fabricated in silicon with atomic-layer-deposited Al 2O 3 and TiN is presented. It is shown that in situ ozone annealing of the Al 2O 3 layers prior to the TiN electrode deposition significantly improves the electric properties of the devices such as the dielectric constant,...
article 2012