Flexible 16nJ/c.s. 134S/s 6b MIM C-2C ADC using Dual Gate Self-aligned Unipolar Metal-Oxide TFTs

Spatial mode-selective waveguide with hyperbolic cladding

Hyperbolic metamaterials (HMMs) are anisotropic materials with a permittivity tensor that has both positive and negative eigenvalues. Here we report that by using a type II HMM as a cladding material, a waveguide that only supports higher-order modes can be achieved, while the lower-order modes become leaky and are absorbed in the HMM cladding....

Characterization and modeling of atomic layer deposited high-density trench capacitors in silicon

A detailed electrical analysis of multiple layer trench capacitors fabricated in silicon with atomic-layer-deposited Al 2O 3 and TiN is presented. It is shown that in situ ozone annealing of the Al 2O 3 layers prior to the TiN electrode deposition significantly improves the electric properties of the devices such as the dielectric constant,...