Real-time focus and overlay measurement by the use of fluorescent markers (poster)

Real-time focus and overlay measurement by the use of fluorescent markers

In lithography, overlay control is getting increasingly complex. Advanced Process Control (APC) is introduced to minimize excursions from the process window for the present exposure. APC uses metrology data of previously exposed wafers, hence, there is always a delay of tens of minutes before the required information is available. This paper...

Improved depth perception with three-dimensional auxiliary display and computer generated three-dimensional panoramic overviews in robot-assisted laparoscopy

In comparison to open surgery, endoscopic surgery offers impaired depth perception and narrower field-of-view. To improve depth perception, the Da Vinci robot offers three-dimensional (3-D) video on the console for the surgeon but not for assistants, although both must collaborate. We improved the shared perception of the whole surgical team by...

Modelling of the PELE fragmentation dynamics

The Penetrator with Enhanced Lateral Effect (PELE) is a type of explosive-free projectile that undergoes radial fragmentation upon an impact with a target plate. This type of projectile is composed of a brittle cylindrical shell (the jacket) filled in its core with a material characterized with a large Poisson's ratio. Upon an impact with a...

Crossbar arrays of nonvolatile, rewritable polymer ferroelectric diode memories on plastic substrates

In this paper, we demonstrate a scalable and low-cost memory technology using a phase separated blend of a ferroelectric polymer and a semiconducting polymer as data storage medium on thin, flexible polyester foils of only 25um thickness. By sandwiching this polymer blend film between rows and columns of metal electrode lines where each...

Process optimization of LIFT through visualization: towards high resolution metal circuit printing

Laser induced forward transfer (LIFT) is a freeform, additive patterning technique capable of depositing high resolution metal structures. A laser pulse is used to generate small droplets from the donor material, defined by the spot size and energy of the pulse. Metallic as well as non-metallic materials can be patterned using this method. Being...

Development of photonic crystal structures for on-board optical communication

We present designs for sharp bends in polymer waveguides using colloidal photonic crystal (PhC) structures. Both silica (SiO2) sphere based colloidal PhC and core-shell colloidal PhC structures having a titania (TiO 2) core inside silica (SiO2) shells are simulated. The simulation results show that core-shell Face Centered Cubic (FCC) colloidal...

Control reconfiguration for cooperative adaptive cruise control ensuring safety and comfort

A Cooperative Adaptive Cruise Control (CACC) system normally consists of different operation modes such as CC (in case no object is detected), ACC and/or CACC. The objective of this study is to find a method for control reconfiguration which ensures a stable, safe and comfortable switching between these operation modes. The approach of mixing...

Analysis of irradiation processes for laser-induced periodic surface structures

The influence of errors on the irradiation process for laser-induced periodic surface structures (LIPSS) was studied theoretically with energy density simulations. Therefore an irradiation model has been extended by a selection of technical variations. The influence of errors has been found in a deviation from optimal conditions, by a shift or...

The influence of surface condition on the metal dusting behavior of cast and wrought chromia forming alloys

The current work investigated the impact of surface condition on the metal dusting behavior of chromia forming alloys. Five commercial alloys were included in the study, wrought 800H, 353MA, and cast G4859, G4852 Micro, and ET45 Micro, these alloys have a chromium and nickel content in the range of 20-35 wt% and 32-45 wt%, respectively. The...

Grease-lubricated reciprocated sliding of a ZrO2-Al2O3couple in high vacuum

Citymobil, advanced transport for the urban environment: An update

CityMobil was an integrated project in the Sixth Framework Program of the European Union. The objective of the project was to achieve more effective organization of urban transport for more rational use of motorized traffic with less congestion and pollution, safer driving, a higher quality of living, and enhanced integration with spatial...

Ink jet technology for large area organic light-emitting diode and organic photovoltaic applications

Due to its flexibility and ease of patterning, ink jet printing has become a popular technique for the noncontact deposition of liquids, solutions, and melts on a variety of substrates at lateral resolutions down to 10 μm. This article presents a study of ink jet printing of homogeneous layers of Orgacon™ (Agfa-Gevaert, Belgium), a water-based...

Athermal laser launch telescopes

ESO has developed a concept for a compact laser guide star unit for use in future Adaptive Optics (AO) systems. A small powerful laser is combined with a telescope that launches the beam, creating a single modular unit that can be mounted directly on a large telescope. This approach solves several of the stability problems experienced with a...