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Kuiper, S. (author), Doelman, N.J. (author), Human, J.D. (author), Saathof, R. (author), Klop, W.A. (author), Maniscalco, M.P. (author)TNO is developing Deformable Mirror (DM) technology, targeted for aberration correction in high-end Adaptive Optics (AO) applications in the field of lithography, astronomy, space and laser communication. The heart of this deformable mirror technology is a unique actuator technology based on the variable reluctance principle. The main advantages...conference paper 2018
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Koek, W.D. (author), Nijkerk, M.D. (author), Smeltink, J.A. (author), van den Dool, T.C. (author), van Zwet, E.J. (author), van Baars, G.E. (author)TNO is developing a High Power Adaptive Mirror (HPAM) to be used in the CO2 laser beam path of an Extreme Ultra-Violet (EUV) light source for next-generation lithography. In this paper we report on a developed methodology, and the necessary simulation tools, to assess the performance and associated sensitivities of this deformable mirror. Our...conference paper 2017
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Witvoet, G. (author), Human, J.D. (author), Maniscalco, M.P. (author)An active tilt mirror mechanism, meant for correction of the constellation breathing of the evolved Laser Interferometer Space Antenna, has been designed and realized. Its open-loop performance has been characterized in both time and frequency domain. Based on this, a feedback controller has been designed and the resulting closed-loop...conference paper 2016