Searched for: subject%3A%22Knowledge%255C%2Bbased%255C%2Bdiagnostics%22
(1 - 1 of 1)
Velikova, M. (author), Ypma, A. (author), Bratosin, C. (author), Lemmen, V. (author), van Wijk, R.J. (author)
Controlling the operations and resolving product performance issues in today’s high-tech production systems, such as semiconductor fabs, becomes a cumbersome task, even for experienced field engineers. To address the pressing need for assisted diagnostics approaches, in this paper we propose a model-based step-wise methodology, based on domain...
conference paper 2019