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Kouters, M.H.M. (author), Slot, H.M. (author), van Zwieten, W. (author), van der Veer, J. (author)
Hydrogen is used as a process gas in vacuum environments for semiconductor manufacturing equipment. If hydrogen dissolves in metallic components during operation it can result in hydrogen embrittlement. In order to assess if hydrogen embrittlement occurs in such a vacuum environment a special fatigue test has been developed. Accelerated life...
article 2014