Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Infiltration of trimethylaluminum (TMA) in molecular layer deposition-enabled alucone thin films on planar substrates is a common observation reported in the literature. An insufficient TMA purge time in such cases is often found to lead to a CVD component in the overall film growth due to the reactions between the outgassing TMA and the co...

Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches

To date, conventional thermal atomic layer deposition (ALD) has been the method of choice to deposit high-quality Pt thin films grown typically from (MeCp)PtMe3 vapor and O2 gas at 300 °C. Plasma-assisted ALD of Pt using O2 plasma can offer several advantages over thermal ALD, such as faster nucleation and deposition at lower temperatures. In...

Large dynamic range Atomic Force Microscope for overlay improvements

Nowadays most overlay metrology tools assess the overlay performance based on marker features which are deposited next to the functional device features within each layer of the semiconductor device. However, correct overlay of the relatively coarse marker features does not directly guarantee correct overlay of the much smaller device features....

Narrow conductive structures with high aspect ratios through single-pass inkjet printing and evaporation-induced dewetting

Inkjet printed silver lines contract to widths below 20-μm during drying on an organic planarization coating. Aspect ratios previously unprecedented with single pass inkjet printing on isotropic homogeneous substrates are obtained. This effect is caused by the subsequent evaporation of solvents from the ink, which results in a continuous...

Reprint of "food-grade electrospinning of proteins"

Developing non-meat food products with an appealing structure is a challenge. In this study, we investigate the possibility to produce thin fibrils as building blocks for texturally interesting meat replacers. The technique applied is electrospinning - a technique which produces thin fibrils with a high aspect ratio. The spinning of proteins is...

Breaking the limits of line width and aspect ratio for inkjet printed conductive lines by controlling post-deposition ink contraction

Electrically conductive structures comprising both narrow line widths and high aspect ratios are indispensable components of many electronic devices. Producing them reliably on an industrial scale by inkjet printing of metal-based inks is a serious challenge. Firstly, due to spreading of the ink on the substrate, widths of 30 microns are...

Modeling and characterization of dielectrophoretically structured piezoelectric composites using piezoceramic particle inclusions with high aspect ratios

In this work, the piezoelectric properties at high electric fields of dielectrophoretically aligned PZT - polymer composites containing high aspect ratio particles (such as short fibers) are presented. Polarization and strain as a function of electric field are evaluated. The properties of the composites are compared to those of PZT-polymer...