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Kuiper, S. (author), Doelman, N.J. (author), Human, J.D. (author), Saathof, R. (author), Klop, W.A. (author), Maniscalco, M.P. (author)
TNO is developing Deformable Mirror (DM) technology, targeted for aberration correction in high-end Adaptive Optics (AO) applications in the field of lithography, astronomy, space and laser communication. The heart of this deformable mirror technology is a unique actuator technology based on the variable reluctance principle. The main advantages...
conference paper 2018