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Vallés-Sanclemente, S. (author), van der Meer, S.L.M. (author), Finkel, M. (author), Muthusubramanian, N. (author), Beekman, M. (author), Ali, H. (author), Marques, J.F. (author), Zachariadis, C. (author), Veen, H.M. (author), Stavenga, T. (author), Haider, N. (author), DiCarlo, L. (author)We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10...article 2023
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- Valckenborg, R.M.E. (author) report 2023
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de Koning, M.C. (author), Ma, K. (author), van Grol, M. (author), Iordanov, I. (author), Kruijne, M.J.L. (author), Idrees, K.B. (author), Xie, H. (author), Islamoglu, T. (author), Bross, R.P.T. (author), Farha, O.K. (author)In the case of an incident with nerve agents, the timely and ready detection and identification of such a substance on suspected surfaces is essential. However, the detection of low levels of nerve agents on a surface is a considerable challenge for conventional detection equipment, especially with VX, a highly toxic nerve agent with low...article 2022
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Hess, P.E. (author), An, C. (author), Brubak, L. (author), Chen, X. (author), Chiu, J.T. (author), Czujko, J. (author), Darie, I. (author), Feng, G. (author), Gaiotti, M. (author), Jang, B.S. (author), Kefal, A. (author), Makmum, S. (author), Ringsberg, J. (author), Romanoff, J. (author), Eldeen, S.S. (author), Schipperen, J.H.A. (author), Tabri, K. (author), Wang, Y. (author), Yanagihara, D. (author)Determining the ultimate strength of ship and offshore structures involves the ability to predict and measure component, sub-system, and system structural maximum capacity beyond which the capacity diminishes. The purpose of this committee is to present a summary of recent work published after the time period covered by the 2018 committee that...conference paper 2022
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Jo, Y. (author), Kwon, J. (author), van der Steen, J.L.J. (author), A. Kronemeijer, A. (author), Jung, S. (author)Here, we present a pseudo-CMOS NOR gate array based on dual-gate amorphous indium-gallium-zinc oxide thin-film transistors (TFTs) on plastic. We fabricated a 14 × 12 array of NOR gates which was programmed using laser-induced forward transfer printing technology to realize a negative-edge-triggered D flip-flop. Two drive transistors in a...article 2021
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van den Boom, S.J. (author), Dragt, R.C. (author), van Veen, D. (author), van Daelen, E.C.M. (author), Berens, J. (author)Additive manufacturing provides the possibility to manufacture parts on demand and offers tremendous form freedom compared to traditional manufacturing methods. However, Fused Filament Fabrication (FFF) is not yet widely used for highly structurally loaded parts, as their strength is hard to control and to predict. In this work we aim to analyze...article 2021
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de Braaf, B. (author), Rops, C.M. (author), Storm, C. (author)In atomic layer deposition (ALD), thin layers of materials are deposited on a substrate with atomic layer precision in the vertical direction. The ability to control layer growth in the lateral direction as well is expected to greatly increase the potential of ALD as a path to the bottom-up additive fabrication of electronic devices like solar...article 2021
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Wolterink, T.A.W. (author), Buijs, R.D. (author), Gerini, G. (author), Verhagen, E. (author), Koenderink, A.F. (author)Overlay measurements are a critical part of modern semiconductor fabrication, but overlay targets have not scaled down in the way devices have. In this work, we produce overlay targets with very small footprint, consisting of just a few scattering nanoparticles in two separate device layers. Using moiré patterns to deterministically generate...article 2021
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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Roulet, M. (author), Atkins, C. (author), Hugot, E. (author), Snell, R. (author), van de Vorst, B. (author), Morris, K. (author), Marcos, M. (author), Todd, I. (author), Miller, C. (author), Dufils, J. (author), Farkas, S. (author), Mezo, G. (author), Tenegi, F. (author), Vega-Moreno, A. (author), Schnelter, H. (author)In this paper we are exploring the possibilities of 3D printing in the fabrication of mirrors for astronomy. Taking the advantages of 3D printing to solve the existing problems caused by traditional manufacturing, two proof-of- concept mirror fabrication strategies are investigated in this paper. The first concept is a deformable mirror with...article 2020
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Schnetler, H. (author), van de Vorst, L.T.G. (author), Snell, R. (author), Atkins, C. (author), Miller, C. (author), Morris, K. (author), Farkas, S. (author), MezA, G. (author), Roulet, M. (author), Hugot, E. (author), Vega-Moreno, A. (author), Tenegi Sanginés, F. (author), Dufils, J. (author)Additive manufacturing (AM) methods and post processing techniques are promising methodologies considering that it is now possible to print in a wide variety of materials using processes much refined from those originally available twenty years ago. To date the uptake of AM in Astronomy is relatively low compared to other application areas,...conference paper 2020
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Berzins, J. (author), Indrisiūnas, S. (author), Fasold, S. (author), Steinert, M. (author), Zukovskaja, O. (author), Cialla-May, D. (author), Gecys, P. (author), Bäumer, S.M.B. (author), Pertsch, T. (author), Setzpfandt, F. (author)Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps)...article 2020
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van der Steen, J.L.P.J. (author), Peters, L.C.J.M. (author), Smits, E.C.P. (author), Zalar, P. (author), Gelinck, G.H. (author)Thermal imagers conventionally consist of a suspended sensing element on support structure with patterned thermal detection layer to get good thermal isolation between sensor elements[1]. Large area and wearable thermal imaging applications require cost effective fabrication, robustness and a flexible form factor. We present a 16×16 active...conference paper 2019
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Rakocevic, L. (author), Gehlhaar, R. (author), Jaysankar, M. (author), Song, W. (author), Aernouts, T. (author), Fledderus, H. (author), Poortmans, J. (author)Thin film perovskite photovoltaic devices combine high power conversion efficiencies with low weight, large area, high speed production capabilities and high versatility in form factor. With this paper, an additional feature is added to the device property portfolio: optical transparency. Results on translucent perovskite modules with...article 2018
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Maalderink, H.H.H. (author), Bruning, F.B.J. (author), de Schipper, M.M.R. (author), van der Werff, J.J.J. (author), Germs, W.W.C. (author), Remmers, J.J.C. (author), Meinders, E.R. (author)The need for personalised and smart products drives the development of structural electronics with mass-customisation capability. A number of challenges need to be overcome in order to address the potential of complete free form manufacturing of electronic devices. One key challenge is the integration of conductive structures and components into...article 2018
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di Giacomo, F.D. (author), Fledderus, H. (author), Gorter, H. (author), Kirchner, G. (author), Vries, I.D. (author), Dogan, I. (author), Verhees, W. (author), Zardetto, V. (author), Najafi, M. (author), Zhang, D. (author), Lifka, H. (author), Galagan, Y. (author), Aernouts, T. (author), Veenstra, S. (author), Groen, P. (author), Andriesse, R. (author)The industrialization of perovskite solar cells (PSC) require processes to efficiently deposit the constituent layers over large areas. In this work we optimized the use of slot die coating process for both sheet-to-sheet (S2S) and roll-to-roll (R2R) manufacturing. Particular focus have been put on the control of the uniformity of perovskite...conference paper 2018
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Zulqarnain, M. (author), Stanzione, S. (author), van der Steen, J.L.P.J. (author), Gelinck, G.H. (author), Myny, K. (author), Abdinia, S. (author), Cantatore, E. (author)This paper presents a 52 μW heart-rate measurement interface for wearable applications, fabricated on a flexible foil with a-IGZO TFTs. The interface consists of a cascaded diode-connected load preamplifier with a gain of 22 dB in 3 kHz bandwidth. The output is provided as a binary PWM waveform, which can be sent to a reader device using...conference paper 2018
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Mameli, A. (author), Merkx, M.J.M. (author), Karasulu, B. (author), Roozeboom, F. (author), Kessels, W.E.M.M. (author), MacKus, A.J.M. (author)Area-selective atomic layer deposition (ALD) is rapidly gaining interest because of its potential application in self-aligned fabrication schemes for next-generation nanoelectronics. Here, we introduce an approach for area-selective ALD that relies on the use of chemoselective inhibitor molecules in a three-step (ABC-type) ALD cycle. A process...article 2017
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French, P. (author), Krijnen, G. (author), Roozeboom, F. (author)Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnetic noise, radiation, or high vacuum. In the...article 2016
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Nanda, G. (author), van Veldhoven, E. (author), Maas, D.J. (author), Sadeghian Marnani, H. (author), Alkemade, P.F.A. (author)The authors report the direct-write growth of hammerhead atomic force microscope (AFM) probes by He+ beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+ beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of...article 2015