Algorithm to Correct Measurement Offsets Introduced by Inactive Elements of Transducer Arrays in Ultrasonic Flow Metering

Ultrasonic flow meters (UFMs) based on transducer arrays offer several advantages. With electronic beam steering, it is possible to tune the steering angle of the beam for optimal signal-tonoise ratio (SNR) upon reception. Moreover, multiple beams can be generated to propagate through different travel paths, covering a wider section of the flow...

Low-Energy Plasma Source for Clean Vacuum Environments: EUV Lithography and Optical Mirrors Cleaning

Fast rotating liquid metal layer as anode for high brightness X-ray source

The new generation compact X-ray source for semiconductor metrology requires a brilliance that is higher than existing technology can offer. In this report, we propose a new X-ray source where an electron beam is focused on a rotating liquid metal anode. We assume that high brilliance emission can be achieved with power densities up to 10 MW/mm2...

DragOnFly: Electronically steerable low drag aeronautical antenna

This paper presents design considerations for the development of wide-scanning antennas for on-craft satellite communications. A scanning coverage of 80° is required for this application over a 15% fractional bandwidth in Ka-band. A solution based on a phased array illuminating a passive superstrate is identified as the most promising. A fully...

Characterizing electron beam induced damage in metrology and inspection of advance devices

Imaging beyond aliasing

A proper spatial sampling is critical for high quality imaging. If the sampling criterion is not met, artifacts appear in the image, generally referred to as grating lobes. For inspection efficiency the width of the field of view is becoming larger leading to an increase in the number of elements and therefore transducer complexity and cost. The...

Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material

This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon...

Evaluation of EUV resist performance below 20nm CD using helium ion lithography

Evaluation of EUV resist performance below 20nm CD using helium ion lithography

For the introduction of EUV lithography, development of high performance EUV resists is of key importance. This development involves studies into resist sensitivity, resolving power and pattern uniformity. We have used a sub-nanometer-sized 30 keV helium ion beam to expose chemically amplified (CAR) EUV resists. There are similarities in the...

Tensile properties of explosively formed 316L(N)-IG stainless steel with and without an electron beam weld

The mechanical properties of two explosively formed saddle shaped 60 mm thick plates of 316L(N)-IG steel with and without an electron beam weld have been investigated. Two different conditions have been characterized: (1) Reference condition and (2) ITER relevant condition. The reference material exhibits consistent results for both plates,...

Control of sawteeth and neo-classical tearing modes in tokamaks using electron cyclotron waves

Resistive magneto-hydrodynamic instabilities are expected to limit the performance of nuclear fusion reactors. Prime examples are the sawtooth instability and the neoclassical tearing modes. The sawtooth instability will affect the refueling of the plasma core and the fast particle concentration. In reactor relevant conditions, the sawtooth can...

Design of an aberration corrected low-voltage SEM

The low-voltage foil corrector is a novel type of foil aberration corrector that can correct for both the spherical and chromatic aberration simultaneously. In order to give a realistic example of the capabilities of this corrector, a design for a low-voltage scanning electron microscope with the low-voltage foil corrector is presented. A fully...

High throughput defect detection with multiple parallel electron beams

A new concept for high throughput defect detection with multiple parallel electron beams is described. As many as 30 000 beams can be placed on a footprint of a in.2, each beam having its own microcolumn and detection system without cross-talk. Based on the International Technology Roadmap for Semiconductors requirements, some high level...

Automated electron tomography of the septal pore cap in Rhizoctonia solani

Dolipore septa and septal pore caps (SPCs) in filamentous basidiomycetes may play an important role in maintaining the integrity of hypal cells. We have investigated the ultrastructure of the dolipore septum and the SPC in Rhizoctonia solani hyphal cells after high-pressure freezing, freeze substitution, and Spurr embedding. We visualized the...

High Resolution Processing with an Active Phased Array SAR

The Dutch PHARUS system is a polarimetric active phased array SAR capable of performing advanced SAR modes. Advanced SAR modes that are being investigated are: spotlight SAR, sliding spotlight SAR, stepped frequency SAR and interferometric SAR. The flight experiments and automatic beam steering implementations are carried out in co-operation...