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Boersma, A. (author), Wang, Y. (author), Bäumer, S.M.B. (author), Lucas, P. (author), Willekers, R.W. (author), Halpin, A. (author), Gomez Rivas, J. (author), Hendriks, N. (author), den Toonder, J. (author)
Stimulated Emission Depletion (STED)lithography is generally recognized as a very promising tool to overcome the Abbe diffraction limit and manufacture 3D submicron features using a mask-less lithography step. It has been shown to be able to create 100 nm resolution, 10 nm feature size features in a polymer resin. However, STED is not widely...
other 2019
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van der Heiden, M.S. (author), Tejeda, H. (author), Rajadurai, S.R.S. (author), Donkers, T. (author), Duivenvoorde, T.L.P. (author), Eslami Amirabadi, H. (author), Ananth, A.N. (author), Lucas, P. (author), van de Steeg, E. (author)
Organ-on-chip technology is based on tissues or (stem)cell derived organ mimicking structures and in microfluidic systems. This technology is used to monitor functional response to stimuli, aiming to enable personalized medicine and to conduct pre-clinical drug development studies. In general, cells in stress exhibit a change in nanomechanical...
other 2019
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Herfst, R.W. (author), Nulkes-de Groot, N. (author), Lucas, P. (author), Bijnagte, T. (author), Dekker, B. (author), Biemond, J.J.B. (author), van Riel, M.J.C.M. (author), van Essen, B.H.M.F. (author), van Koppen, M.E.C.T. (author), Oosterling, J.A.J. (author), Kramer, L. (author), Nieuwkoop, E. (author), Corbet, F. (author), Visser, L. (author), Man, H. (author)
We developed a new 3D-AFM technique that enables imaging of high aspect ratio trenches. By measuring both lateral and vertical forces on a cantilever tip, a subharmonic mode based on the attractive tip-sample forces becomes feasible. This enables the measurement of true 3D information of samples without causing damage. This is especially...
other 2019
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van den Dool, T.C. (author), Kramer, L. (author), Kruidhof, R. (author), Kastelein, A. (author), Dekker, B. (author), Nieuwkoop, E. (author), Lugtenburg, J. (author)
This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleaning. All at the nano-scale. The carriers can make large movements in X-and Y-direction and have a...
other 2019
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Rajadurai, S.R.S. (author), Tamer, M.S. (author), Paul, P. (author), Maturova, K. (author), Wildschut, J.A. (author), Weber, S. (author), Bonanni, S. (author), Koppen, M. (author), van der Lans, M.J. (author)
TNO and SwissLitho AG were studying the feasibility of a high-throughput, maskless nanopatterning solution for nanostructures down to few nanometers using SwissLitho’s thermal scanning probe lithography (t-SPL)a. The solution enables: Parallelization of nanopatterning on wafers and samples; Non-destructive readout by implementing dynamic mode...
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Koek, W.D. (author), van Zwet, E.J. (author), Plissi, M. (author), Eschen, M. (author), Piras, D. (author), van Neer, P.L.M.J. (author), van der Lans, M.J. (author)
We have developed a photo thermal acoustic imaging (PTAI)setup and have applied it for the characterization of sub surface features composed of materials which are commonly used in the semiconductor industry. Photo thermal acoustic imaging (PTAI) is a measurement technique that combines the practical advantages of an optical technique (non...
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Stoevelaar, L.P. (author), Gerini, G. (author)
This contribution presents the design and performance assessment of a metasurface based spectro-polarimeter concept.
other 2019
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van der Heiden, M.S. (author), Harmsma, P.J. (author), Altmann, R.K. (author), Lucas, P. (author), Thuaire, A. (author), Papanastasiou, D. (author), Favero, I. (author), Sbarra, S. (author), Tamayo, J. (author)
Measuring the nano-mechanical properties of viruses opens a new route to identify viruses and to assess their infectiveness. Current targeted techniques, like PCR, are only suitable for confirmation and have a high false positive rate due to cross contamination and DNA strands presents in the blood sample after former infection. The...
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van Neer, P.L.M.J. (author), van Es, M.H. (author), Piras, D. (author), Navarro, V. (author), Mohtashami, A. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)
This work details the initial simulation and experimental GHz SPM work carried out at TNO.
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van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Shoeibi Omrani, P.S. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Quesson, B.A.J. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)
other 2019
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Stoevelaar, L.P. (author), Gerini, G. (author)
TNO is currently performing a theoretical assessment of an optical system based on a Solid Immersion Lens (SIL). This contribution presents the theoretical approach and the modelling framework developed for this study.
other 2019
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Kok, W.D. (author), Kruithof, M.C. (author)
One of the main challenges in detecting a nano-sized particle on a ‘rough’ surface is to differentiate the particle from speckle that is caused by the substrate. The ‘traditional’ approach in particle detection is to record multiple images under varying illuminations, and sum the recorded irradiance distributions. Since the speckles will be...
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Rajadurai, S.R.S. (author), Piras, D. (author), Hatakeyama, K. (author), van Neer, P.L.M.J. (author), van Es, M.H. (author), van der Lans, M.J. (author)
This technique uses an Atomic force microscope (AFM) to map the elastic properties of buried materials with high spatial resolution. Ultrasound excitation is applied to the tip-sample interface in the AFM, while the probe’s dynamic response is monitored. The excitation is a carrier of high frequency fc, that is amplitude-modulated at a lower...
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Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author), van der Lans, M.J. (author)
Scanning Probe Microscopy (SPM) has emerged as a metrology solution for the semiconductor industry enabling high throughput defect review and high resolution 3D metrology. TNO has developed a Subsurface Ultrasonic Resonant Force Microscopy (SSURFM) for non-destructive, high resolution imaging of features buried under one or more layers of...
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Peters, J. (author), Herfst, R.W. (author), Witvoet, G. (author), Kuiper, S. (author), van Es, M.H. (author), Willekers, R.W. (author)
TNO developed a novel Large Dynamic Range Atomic Force Microscope (LDRAFM), designed for sub-nm accurate metrology. The current work provides an overview of recent developments and presents the results obtained after final integration of the complete system. Results indicate impressive stability over long range, enabling subnm metrology...
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van Neer, P.L.M.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), Piras, D. (author), van der Lans, M.J. (author)
GOAL: investigate feasibility of top actuated scattering based SSPM using simulations.
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van Reijzen, M.E. (author), Tamer, M.S. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Duivenvoorde, T. (author), Keyvani Janbahan, A. (author), Sadeghian Marnani, S. (author), van der Lans, M.J. (author)
In the semiconductor industry, the need for characterization of subsurface features of wafers on a sub-nanometer level becomes ever more important. With Scanning Subsurface Probe Microscopy (SSPM), the smallest features can be measured with high resolution.
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van Es, M.H. (author), Sadeghian Marnani, H. (author)
Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on a change in the sensing cantilever’s resonance frequency to detect subsurface structures through their mechanical properties. It gains sensitivity both from exploiting the cantilevers large dynamical stiffness at high frequency and from using the sensitivity of the shifting...
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Fillinger, L. (author), Tamer, M.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)
The TNO Optomechatronics Department is developing various Scanning Probe Microscopy (SPM) techniques, including Sub-surface Atomic Force Microscopy (AFM), as a way to address challenges for nondestructive quality control of optically opaque samples. To support the research and technical developments and to extract quantitative data CD metrology...
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Keyvani Janbahan, A. (author), Tamer, M.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)
Elasticity based Sub- surface Atomic Force Microscopy is a promising metrology solution for CD measurements, defect characterization and alignment and overlay applications.
other 2019
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