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Roozeboom, F. (author), Smets, M. (author), Kniknie, B. (author), Hoppenbrouwers, M. (author), Dingemans, G. (author), Keuning, W. (author), Kessels, W.M.M. (author), Pohl, R. (author), Huis In't Veld, A.J. (author)The current industrial process of choice for Deep Reactive Ion Etching (DRIE) of 3D features, e.g. Through-Silicon Vias (TSVs), Microelectromechanical Systems (MEMS), etc., is the Bosch process, which uses alternative SF 6 etch cycles and C4F8-based sidewall passivation cycles in a time-sequenced mode. An alternative, potentially faster and more...conference paper 2013
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Illiberi, A. (author), Grob, F. (author), Frijters, C. (author), Poodt, P. (author), Ramachandra, R. (author), Winands, H. (author), Simor, M. (author), Bolt, P.J. (author)Undoped zinc oxide (ZnO) films have been grown on a moving glass substrate by plasma-enhanced chemical vapor deposition at atmospheric pressure. High deposition rates of ∼7 nm/s are achieved at low temperature (200°C) for a substrate speed from 20 to 60 mm/min. ZnO films are highly transparent in the visible range (90%). By a short (∼minute)...article 2013
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Eggenhuisen, T.M. (author), Coenen, M.J.J. (author), Staats, T.W.L. (author), Gorter, H. (author), Sweelssen, J. (author), Groen, P. (author)Transferring lab-scale processes of organic electronics to large area roll-to-roll production requires the use of up-scalable deposition techniques. Furthermore, industrial production demands the omission of halogenated and other harmful solvents. Here we discuss the solution processing of organic light emitting diodes (OLEDs) or organic...conference paper 2013
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Griffioen, J. (author), Vermooten, S. (author), Janssen, G. (author)With the exception of the south of the country, the Netherlands has a strong bipartite hydrogeology: the Holocene part with a coastal dune belt and confining top layer of clay and peat further inland, and the Pleistocene, where thick phreatic aquifers dominate. This research aimed to ascertain the geochemical and palaeohydrological controls on...article 2013
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Sutton, M.A. (author), Reis, S. (author), Riddick, S.N. (author), Dragosits, U. (author), Nemitz, E. (author), Theobald, M.R. (author), Tang, Y.S. (author), Braban, C.F. (author), Vieno, M. (author), Dore, A.J. (author), Mitchell, R.F. (author), Wanless, S. (author), Daunt, F. (author), Fowler, D. (author), Blackall, T.D. (author), Milford, C. (author), Flechard, C.R. (author), Loubet, B. (author), Massad, R. (author), Cellier, P. (author), Personne, E. (author), Coheur, P.F. (author), Clarisse, L. (author), van Damme, M. (author), Ngadi, Y. (author), Clerbaux, C. (author), Skjøth, C.A. (author), Geels, C. (author), Hertel, O. (author), Kruit, R.J.W. (author), Pinder, R.W. (author), Bash, J.O. (author), Walker, J.T. (author), Simpson, D. (author), Horváth, L. (author), Misselbrook, T.H. (author), Bleeker, A. (author), Dentener, F. (author), de Vries, W. (author)Existing descriptions of bi-directional ammonia (NH3) land-atmosphere exchange incorporate temperature and moisture controls, and are beginning to be used in regional chemical transport models. However, such models have typically applied simpler emission factors to upscale the main NH3 emission terms. While this approach has successfully...article 2013
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Erkens, I.J.M. (author), Blauw, M.A. (author), Verheijen, M.A. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)Ultralow-power gas sensing devices need to operate without an energy consuming heater element. This requires the design of sensing devices that are so efficient that they can operate at room temperature (RT). Here, we report on the RT sensing performance of atomic layer deposition (ALD) prepared i-ZnO and Al-doped ZnO sensing devices. The...article 2013
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Wu, Y. (author), Potts, S.E. (author), Hermkens, P.M. (author), Knoops, H.C.M. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)Atomic layer deposition offers the unique opportunity to control, at the atomic level, the 3D distribution of dopants in highly uniform and conformal thin films. Here, it is demonstrated that the maximum doping efficiency of Al in ZnO can be improved from ∼10% to almost 60% using dimethylaluminum isopropoxide (DMAI, Al(CH3)2(OiPr)) as an...article 2013
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Illiberi, A. (author), Scherpenborg, R. (author), Poodt, P. (author), Roozeboom, F. (author)Undoped and indium doped ZnO films have been grown by Spatial Atomic Layer Deposition at atmospheric pressure. The electrical properties of ZnO films are controlled by varying the indium content in the range from 0 to 15 %. A minimum resistivity value of 3 mΩ•cm is measured in 180 nm thick films for In/(In+Zn) ratio equal to 6 %, corresponding...article 2013
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Illiberi, A. (author), Scherpenborg, R. (author), Wu, Y. (author), Roozeboom, F. (author), Poodt, P. (author)The possibility of growing multicomponent oxides by spatial atmospheric atomic layer deposition has been investigated. To this end, Al xZn1-xO films have been deposited using diethyl zinc (DEZ), trimethyl aluminum (TMA), and water as Zn, Al, and O precursors, respectively. When the metal precursors (i.e., TMA and DEZ) are coinjected in the...article 2013
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van de Burgt, Y. (author), Champion, A. (author), Bellouard, Y. (author)Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a...article 2013
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Wu, Y. (author), Hermkens, P.M. (author), van de Loo, B.W.H. (author), Knoops, H.C.M. (author), Potts, S.E. (author), Verheijen, M.A. (author), Roozeboom, F. (author), Kessels, W.M.M. (author)In this work, the structural, electrical, and optical properties as well as chemical bonding state of Al-doped ZnO films deposited by atomic layer deposition have been investigated to obtain insight into the doping and electrical transport mechanisms in the films. The range in doping levels from 0% to 16.4% Al was accomplished by tuning the...article 2013
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van Deelen, J. (author), Illiberi, A. (author), Kniknie, B.J. (author), Steijvers, H.L.A.H. (author), Lankhorst, A.M. (author), Simons, P.J.P.M. (author)Atmospheric pressure chemical vapor deposition (APCVD) of ZnO from diethyl zinc (DEZn) and t-butanol was performed using an industrial reactor design. Deposition profiles were recorded to gain insight in the position dependent variations in layer thickness in such a reactor. We observed that for a deposition temperature below 400 °C most of the...article 2013
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Abadjieva, E. (author), van der Heijden, A.E.D.M. (author), Creyghton, Y.L.M. (author), van Ommen, J.R. (author)Fluorocarbon coatings have been deposited on micron-sized silica particles by means of atmospheric pressure plasma-enhanced chemical vapor deposition (PECVD). The silica particles have a diameter in the range between 40 and 70 ?m. They are fluidized at atmospheric pressure in a circulating fluidized bed combined with a dielectric barrier...article 2012
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Theelen, M.J. (author), Habets, D. (author), Staemmler, L. (author), Winands, H. (author), Bolt, P.J. (author)Organosilicon coatings provide good optical and mechanical properties and are excellent candidates for the modification of the surface energy of polymers. These coatings can be deposited by plasma polymerization of hexamethyldisiloxane (HMDSO) under atmospheric pressure and at room temperature. The resulting films can range from soft,...article 2012
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Li, M. (author), Stingelin, N. (author), Michels, J.J. (author), Spijkman, M.-J. (author), Asadi, K. (author), Beerends, R. (author), Biscarini, F. (author), Blom, P.W.M. (author), de Leeuw, D.M. (author)The processing of solution-based binary blends of the ferroelectric random copolymer poly(vinylidene fluoride-trifluoroethylene) P(VDF-TrFE) and the semiconducting polymer poly(9,9-dioctylfluorenyl-2,7-diyl) (PFO) applied by spin-coating and wire-bar coating is investigated. By systematic variation of blend composition, solvent, and deposition...article 2012
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Illiberi, A. (author), Roozeboom, F. (author), Poodt, P.W.G. (author)Zinc oxide thin films have been deposited at high growth rates (up to ~1 nm/s) by spatial atomic layer deposition technique at atmospheric pressure. Water has been used as oxidant for diethylzinc (DEZ) at deposition temperatures between 75 and 250 °C. The electrical, structural (crystallinity and morphology), and optical properties of the films...article 2012
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George, A. (author), Stawski, T.M. (author), Unnikrishnan, S. (author), Veldhuis, S.A. (author), ten Elshof, J.E. (author)A simple and cost effective methodology for large area micro and nanopatterning of a wide range of functional materials on flexible substrates is presented. A hydrophobic-hydrophilic chemical contrast was patterned on surfaces of various flexible plastic substrates using molds and shadow masks with which selected areas of the substrate surface...article 2012
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Banzhaf, S. (author), Schaap, M. (author), Kerschbaumer, A. (author), Reimer, E. (author), Stern, R. (author), van der Swaluw, E. (author), Builtjes, P. (author)The Chemistry Transport Model REM-Calgrid (RCG) has been improved by implementing an enhanced description of aqueous-phase chemistry and wet deposition processes including droplet pH. A sensitivity study on cloud and rain droplet pH has been performed to investigate its impact on model sulphate production and gas wet scavenging. Air...article 2012
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- van Deelen, J. (author), Rendering, H. (author), Klerk, L. (author), Hovestad, A. (author) conference paper 2012
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Poodt, P.W.G. (author), Cameron, D.C. (author), Dickey, E. (author), George, S.M. (author), Kuznetsov, V. (author), Parsons, G.N. (author), Roozeboom, F. (author), Sundaram, G. (author), Vermeer, A. (author)Atomic layer deposition (ALD) is a technique capable of producing ultrathin conformal films with atomic level control over thickness. A major drawback of ALD is its low deposition rate, making ALD less attractive for applications that require high throughput processing. An approach to overcome this drawback is spatial ALD, i.e., an ALD mode...article 2012