Atomic Layer Deposition Applications 12

Spatial Atomic Layer Deposition of Zn(O,S) buffer layers for CIGS solar cells

Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2

Atomic Layer Deposition of In2O3: from InCp and H2O/O2: Microstructure and Isotope Labeling Studies

Developments in plasma enhanced spatial ALD for high throughput applications [3.04]

New options in advanced atomic layer processing

Precision in harsh environments

The influence of non-stoichiometry on the switching kinetics of strontium-titanate ReRAM devices

Helium ion beam induced growth of hammerhead AFM probes

Impact of the Cd2+ treatment on the electrical properties of Cu2ZnSnSe4 and Cu(In,Ga)Se2 solar cells

Results of real-time production optimization of a maturing North Sea gas asset with production constraints

Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching

Spatial atmospheric atomic layer deposition of InxGayZnzO for thin film transistors

Spatial atmospheric ALD of functional layers for CIGS Solar Cells

Atomic Layer Etching: What can we learn from Atomic Layer Deposition?

A Spatial ALD oxide passivation module in an all-spatial etch-passivation cluster concept

Hydrodynamic perspective on asphaltene agglomeration and deposition

Life-cycle assessment framework for indoor emissions of synthetic nanoparticles

Estimating the distribution of salt cavern squeeze using subsidence measurements

High-resolution direct-write patterning using focused ion beams