Joint analysis of deposition fluxes and atmospheric concentrations of inorganic nitrogen and sulphur compounds predicted by six chemistry transport models in the frame of the EURODELTAIII project

High-mobility channels in Thin Film Transistors made from amorphous indium zinc oxide (IZO) semiconductor films grown by atmospheric pressure plasma-enhanced spatial ALD

Modelling and mapping heavy metal and nitrogen concentrations in moss in 2010 throughout Europe by applying Random Forests models

Atmospheric pressure plasma enhanced spatial ALD of ZrO2 for low-temperature, large-area applications

Atomic Layer Processing: Basics, materials, processes & applications

Atmospheric spatial atomic-layer-deposition of Zn(O,S) buffer layer for flexible Cu(In,Ga)Se2 solar cells: From lab-scale to large area roll to roll processing

Plasma technology for spatial ALD of conductive layers

Area-Selective Atomic Layer Deposition of IN2O3:H Using a u Plasma Printer for Local Area Activation

Evaluation of seven chemistry transport models in the framework of eurodelta III intercomparison exercise

Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2 for Low-Temperature, Large-Area Applications

Area-Selective Atomic Layer Deposition of SiO2 using acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

Toward high volume solution based roll-to-roll processing of OLEDs

Atmospheric spatial atomic-layer-deposition of Zn(O, S) buffer layer for flexible Cu(In, Ga)Se2 solar cells: From lab-scale to large area roll to roll processing

Monolithic two-terminal hybrid a-Si:H/CIGS tandem cells

On the Growth, Percolation and Wetting of Silver Thin Films Grown by Atmospheric-Plasma Enhanced Spatial Atomic Layer Deposition

Direct-write ALD of In2O3:H using a μ-plasma printer

Atomic Layer Deposition Applications 12

Spatial Atomic Layer Deposition of Zn(O,S) buffer layers for CIGS solar cells

Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2