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Kuiper, S. (author), Doelman, N.J. (author), Human, J.D. (author), Saathof, R. (author), Klop, W.A. (author), Maniscalco, M.P. (author)TNO is developing Deformable Mirror (DM) technology, targeted for aberration correction in high-end Adaptive Optics (AO) applications in the field of lithography, astronomy, space and laser communication. The heart of this deformable mirror technology is a unique actuator technology based on the variable reluctance principle. The main advantages...conference paper 2018
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TNO Industrie en Techniek (author), Hamelinck, R. (author), Rosielle, N. (author), Steinbuch, M. (author), Doelman, N.J. (author)New deformable mirror technology is developed by the Technische Universiteit Eindhoven, Delft University of Technology and TNO Science and Industry. Several prototype adaptive deformable mirrors are realized mirrors, up to 427 actuators and ∅150mm diameter, with characteristics suitable for future AO systems. The prototypes consist of a 100µm...conference paper 2010