Van Assche, F.J.H. (author), Unnikrishnan, S. (author), Michels, J.J. (author), van Mol, A.M.B. (author), van de Weijer, P. (author), van de Sanden, M.C.M. (author), Creatore, M. (author) We report on a low substrate temperature (110°C) remote microwave plasma-enhanced chemical vapor deposition (PECVD) process of silicon nitride barrier layers against moisture permeation for organic light emitting diodes (OLEDs) and other moisture sensitive devices such as organic photovoltaic cells (OPVs). Specifically, the influence of the SiH4...
article 2014