Searched for: subject%3A%22Atomic%255C%2Bforce%255C%2Bmicroscopy%22
(1 - 20 of 41)
- document
-
Nahar, S. (author), Porot, L. (author), Apostolidis, P. (author)In the past years, the use of liquid additives as bitumen modifiers has increased to tailor the rheology of bitumen for a wide range of applications. Their chemical composition and mutual interaction result in specific phase morphologies in the binders. Hence, there is a need to evaluate the phase morphology of complex binders and the impact of...article 2022
- document
- Piras, D. (author), van Neer, P.L.M.J. (author), Thijssen, R.M.T. (author), Sadeghian, H. (author) article 2020
- document
-
Keyvani Janbahan, A. (author), van der Veen, G. (author), Tamer, M.S. (author), Sadeghian Marnani, H. (author), Goosen, H. (author), van Keulen, F. (author)The real-time and accurate measurement of tip-sample interaction forces in Tapping Mode Atomic Force Microscopy (TM-AFM) is a remaining challenge. This obstruction fundamentally stems from the causality of the physical systems. Since the input of the dynamic systems propagates to the output with some delay, and multiple different inputs can...article 2020
- document
-
Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), Es, M. (author), M.H. van, (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), van der Lans, M.J. (author)In Subsurface Scanning Probe Microscopy (SSPM), Atomic Force Microscopy (AFM) is combined with ultrasound. The AFM cantilever is used as a receiver. At low frequencies (O(MHz)) the method can be used to measure the stiffness contrast in a sample and at high frequencies (O(GHz)) to measure scattering based contrast. Both variants use modulated...conference paper 2020
- document
-
Herfst, R.W. (author), Nulkes-de Groot, N. (author), Lucas, P. (author), Bijnagte, T. (author), Dekker, B. (author), Biemond, J.J.B. (author), van Riel, M.J.C.M. (author), van Essen, B.H.M.F. (author), van Koppen, M.E.C.T. (author), Oosterling, J.A.J. (author), Kramer, L. (author), Nieuwkoop, E. (author), Corbet, F. (author), Visser, L. (author), Man, H. (author)We developed a new 3D-AFM technique that enables imaging of high aspect ratio trenches. By measuring both lateral and vertical forces on a cantilever tip, a subharmonic mode based on the attractive tip-sample forces becomes feasible. This enables the measurement of true 3D information of samples without causing damage. This is especially...other 2019
- document
-
Witvoet, G. (author), Peters, J. (author), Kuiper, S. (author), Keyvani, S. (author), Willekers, R.W. (author)TNO is developing a novel Large Dynamic Range Atomic Force Microscope (LDR-AFM), primarily but not exclusively designed for sub-nm accurate overlay metrology. The LDR-AFM combines an AFM with a 6 degrees- of-freedom interferometric positioning stage, thereby enabling measurements of sub-nm features on a wafer over multiple millimeters marker-to...conference paper 2019
- document
-
Rajadurai, S.R.S. (author), Piras, D. (author), Hatakeyama, K. (author), van Neer, P.L.M.J. (author), van Es, M.H. (author), van der Lans, M.J. (author)This technique uses an Atomic force microscope (AFM) to map the elastic properties of buried materials with high spatial resolution. Ultrasound excitation is applied to the tip-sample interface in the AFM, while the probe’s dynamic response is monitored. The excitation is a carrier of high frequency fc, that is amplitude-modulated at a lower...other 2019
- document
-
Kramer, L. (author), van den Dool, T.C. (author), Witvoet, G. (author)Abstract: High throughput qualification of semiconductor devices is needed to improve cost efficiency. This paper describes a nano-precision capable, multi-agent, flexible positioning platform, which can be used to increase (metrology) throughput in semiconductor industry by parallelization of measurements. It is based on magnetic levitation and...conference paper 2019
- document
-
Keyvani Janbahan, A. (author), Tamer, M.S. (author), van Es, M.H. (author), van der Lans, M.J. (author)Elasticity based Sub- surface Atomic Force Microscopy is a promising metrology solution for CD measurements, defect characterization and alignment and overlay applications.other 2019
- document
-
Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Goosen, H. (author), van Keulen, F. (author)The origin of amplitude reduction in Tapping Mode Atomic Force Microscopy (TM-AFM) is typically attributed to the shift in resonance frequency of the cantilever due to the nonlinear tip-sample interactions. In this paper, we present a different insight into the same problem which, besides explaining the amplitude reduction mechanism, provides a...article 2018
- document
-
van Es, M.H. (author), Mohtashami, A. (author), van Neer, P.L.M.J. (author), Sadeghian Marnani, H. (author)Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important in a wide variety of fields. From fundamental research into the way living cells are built up to process control in semiconductor manufacturing would all benefit from the capability to image nanoscale...article 2018
- document
-
Tamer, M.S. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increase the accuracy and the resolution, but these features are much larger than the IC feature size....conference paper 2018
- document
-
Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Navarro, V. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Many techniques are under development for the detection of subsurface defects or cracks. One such method is GHz subsurface probe microscopy (GHz SSPM). Here, modulated GHz elastic waves are transmitted through the bottom of a sample. The waves are scattered by buried features and detected using the probe of an atomic force microscope (AFM),...conference paper 2018
- document
-
Sadeghian Marnani, H. (author), Bijnagte, A.A. (author), Herfst, R.W. (author), Kramer, G.F.IJ. (author), Kramer, L. (author), Dekker, A. (author)In atomic force microscopy (AFM), the exchange and alignment of the AFM cantilever with respect to the optical beam and position-sensitive detector (PSD) are often performed manually. This process is tedious and time consuming, and sometimes damages the cantilever or tip. To increase the throughput of AFM in industrial applications, the ability...article 2017
- document
-
Keyvani Janbahan, A. (author), Alijani, F. (author), Sadeghian Marnani, H. (author), Maturova, K. (author), Goosen, H. (author), van Keulen, F. (author)This paper investigates the closed-loop dynamics of the Tapping Mode Atomic Force Microscopy using a new mathematical model based on the averaging method in Cartesian coordinates. Experimental and numerical observations show that the emergence of chaos in conventional tapping mode AFM strictly limits the imaging speed. We show that, if the...article 2017
- document
-
Keyvani, A. (author), Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author)In this paper we present a new AFM based nano-patterning technique that can be used for fast defect repairing of high resolution photomasks and possibly other high-speed nano-patterning applications. The proposed method works based on hammering the sample with tapping mode AFM followed by wet cleaning of the residuals. On the area where a...conference paper 2016
- document
-
Kuiper, S. (author), Fritz, E.C. (author), Crowcombe, W.E. (author), Liebig, T. (author), Kramer, G.F.I. (author), Witvoet, G. (author), Duivenvoorde, T. (author), Overtoom, A.J. (author), Rijnbeek, R.A. (author), van Zwet, E.J. (author), van Dijsseldonk, A. (author), den Boef, A. (author), Beems, M. (author), Levasier, L. (author)Nowadays most overlay metrology tools assess the overlay performance based on marker features which are deposited next to the functional device features within each layer of the semiconductor device. However, correct overlay of the relatively coarse marker features does not directly guarantee correct overlay of the much smaller device features....conference paper 2016
- document
-
van Es, M.H. (author), Sadeghian Marnani, H. (author)Inspection of EUV mask substrates and blanks is demanding. We envision this is a good target application for massively parallel Atomic Force Microscopy (AFM). We envision to do a full surface characterization of EUV masks with AFM enabling 1nm true 3D resolution over the entire surface. The limiting factor to do this is in the sensor itself:...conference paper 2016
- document
-
Nanda, G. (author), van Veldhoven, E. (author), Maas, D.J. (author), Sadeghian Marnani, H. (author), Alkemade, P.F.A. (author)The authors report the direct-write growth of hammerhead atomic force microscope (AFM) probes by He+ beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+ beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of...article 2015
- document
-
Nieuwland, M. (author), Bouwman, W.G. (author), Bennink, M.L. (author), Silletti, E. (author), de Jongh, H.H.J. (author)Mechanical behavior of a protein gel plays a large role in sensory properties. Despite the large amount of research on caseins, the origin of the mechanical behavior is not well understood yet. To determine the length scales that are relevant for the mechanical behavior of casein gels, casein micelles were crosslinked with increasing amount of...article 2015
Searched for: subject%3A%22Atomic%255C%2Bforce%255C%2Bmicroscopy%22
(1 - 20 of 41)