Searched for: subject%3A%22Aberration%255C%2Bcorrection%22
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Kuiper, S. (author), Doelman, N.J. (author), Human, J.D. (author), Saathof, R. (author), Klop, W.A. (author), Maniscalco, M.P. (author)
TNO is developing Deformable Mirror (DM) technology, targeted for aberration correction in high-end Adaptive Optics (AO) applications in the field of lithography, astronomy, space and laser communication. The heart of this deformable mirror technology is a unique actuator technology based on the variable reluctance principle. The main advantages...
conference paper 2018
van Aken, R.H. (author), Maas, D.J. (author), Hagen, C.W. (author), Barth, J.E. (author), Kruit, P. (author), TNO Industrie en Techniek (author)
The low-voltage foil corrector is a novel type of foil aberration corrector that can correct for both the spherical and chromatic aberration simultaneously. In order to give a realistic example of the capabilities of this corrector, a design for a low-voltage scanning electron microscope with the low-voltage foil corrector is presented. A fully...
article 2010