Searched for: subject%3A%22ALE%22
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Roozeboom, F. (author)
The IRDS 2017 Roadmap catches the scaling challenges faced by the semiconductor industry in the upcoming decades by the overall term "3D Power Scaling". In the past scaling era superior material properties and critical dimensions nearing single-digit nanometer values could still be realized by cost-effective technology solutions. As we approach...
public lecture 2021
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Roozeboom, F. (author), Ehm, D.H. (author), Illiberi, A. (author), Becker, M. (author), te Sligte, E. (author), Creijghton, Y.L.M. (author)
A method for at least partially removing a contamination layer (24) from an optical surface (14a) of an optical element (14) that reflects EUV radiation includes: performing an atomic layer etching process for at least partially removing the contamination layer (24) from the optical surface (14a), which, in tum, includes: exposing the...
patent 2021
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Mameli, A. (author), Brüner, P. (author), Roozeboom, F. (author), Grehl, T. (author), Poodt, P. (author)
public lecture 2020
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Harmsen, J. (author), van Eijck, C. (author), Wagner, H. (author)
public lecture 2020
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Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)
public lecture 2019
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Mameli, A. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2019
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Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)
Area-selective atomic layer deposition (AS-ALD) has the potential for pushing device manufacturing towards new frontiers. However, the selectivity that can be obtained is often very limited and the throughput of most AS-ALD methods is low, which hampers its industrial acceptance.[1,2] In this work, we present a process for AS-ALD of SiO2 using...
public lecture 2019
document
Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)
public lecture 2019
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Roozeboom, F. (author)
public lecture 2019
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Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)
public lecture 2019
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Mione, M.A. (author), Creyghton, Y. (author), Engeln, R. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2019
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Mione, M.A. (author), Engeln, R. (author), Vandalon, V. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2019
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Mione, M.A. (author), Engeln, R. (author), Vandalon, V. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
Atmospheric-pressure Plasma-Enhanced spatial Atomic Layer Deposition (PE-s-ALD) is a high-throughput technique for synthesizing thin films at low temperatures for large area applications. The spatial separation of the ALD half-reactions and the use of an atmospheric pressure plasma as the reactant give rise to complex surface chemistry which is...
article 2019
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Mameli, A. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2018
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Theelen, M. (author), de Graaf, F. (author), Daume, F. (author), Barreau, N. (author), Vroon, Z. (author), Zeman, M. (author)
Degradation rates and mechanisms for molybdenum back contacts and ZnO:Al front contacts exposed to damp heat were obtained from literature and experiments. It was found that molybdenum back contacts with a higher density and covered by a MoSe2 film are more stable than their low density, bare counterparts. For ZnO:Al front contacts, various...
conference paper 2016
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Roozeboom, F. (author)
public lecture 2016
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Roozeboom, F. (author)
public lecture 2016
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Broekman, H. (author), Verhoeckx, K. (author), Gaspari, M. (author), den Hartog Jager, S. (author), Houben, G. (author), Knulst, A. (author)
Patients with a shrimp allergy, can also react to similar allergens from other crustaceans, shellfish or mollusks. Due to the quest for new protein sources, insects are being looked at to see if they could be a source for these proteins. In vitro studies show that the crustacean allergic patients are at risk to develop allergic symptoms when...
article 2014
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Abdul Fattah, R. (author), Meekes, S. (author), van Wees, J.D. (author)
article 2014
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Yang, Z. (author), Fischer, H.R. (author), Cerezo, J. (author), Mol, J.M.C. (author), Polder, R.B. (author)
A carbonate form of MgAl hydrotalcite, Mg(2)Al-CO3 and its p-aminobenzoate (pAB) modified derivative, Mg(2)Al-pAB, were synthesized and characterized by means of XRD, FT-IR and TG/DSC. The anticorrosion behavior of Mg(2)Al-pAB was evaluated based on open circuit potential (OCP) of carbon steel in simulated concrete pore solution and on chloride...
article 2013
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