Modelling lateral web dynamics for R2R equipment design

A model describing the lateral dynamic behaviour of a web between and on rollers is implemented to aid in the design of roll to roll equipment. The model is validated on an industrial setup, and disturbances acting on the web were estimated. The model equations were used to visualise the interdependence between the span length and the...

Interconnect minimisation for flexible solar cells

Series connections in solar cells are made to decrease the current, and therewith the transport losses in a cell. Solar energy is not converted at these interconnections and they should therefore be as small as possible. Several laser scribes and printing steps can make a series interconnection between the back and front of a cell, while...

Roll-to-roll fabricated organic devices

Equipment for atmospheric, spatial atomic layer deposition in roll-to-roll processes

A novel type of reactor has been designed for atmospheric atomic layer deposition (ALD) on flexible substrates. In the reactor, a flexible substrate slowly advances around a fast rotating drum. Gas bearing technology is used to prevent physical contact between the flexible substrate and the drum, and to separate reactants to enable a spatial ALD...

Fabrication of strongly curved aspheric silicon carbide mirrors

TNO Science and Industry has designed and is currently developing the Basic Angle Monitoring Opto-Mechanical Assembly (BAM OMA) [1], which is part of the GAIA spacecraft. In GAIA two telescopes mounted on a slowly spinning satellite will measure the position of the stars with an accuracy much higher as ever done before. Crucial in the system is...

Low-frequency vibration isolation in six degrees of freedom: The Hummingbird

TNO Science and Industry and MECAL have developed a six degree of freedom vibration isolation system that suppresses both floor vibrations and direct forces on a table top. The achieved reduction of transmissibility and compliance is 40 dB between 1 and 50 Hz in vertical direction, and 30 dB between 1 and 20 Hz in horizontal direction. Key...

Real-time compensation of dynamic thermally induced optical aberrations by a deformable mirror based on reluctance actuators

The resolving power of an optical system is often limited by the presence of timevarying wavefront distortions caused by heat flows. The aberrations do not only include tip/tilt and focus terms, but also higher spatial frequencies, due to the heat flow’s turbulent nature. TNO has built an adaptive optics (AO) breadboard, to demonstrate the...

Thermomechanical design of a temperature controlled heat shield

Thermomechanical system analysis plays an important role in the design of thermally loaded machine components. Specifications on maximum allowed temperature or material stress may be leading in the design process. Precision machines also have narrow specifications on shape tolerance and position accuracy. Extreme conditions like high heat loads...

Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt...

A lightweight suction gripper for micro assembly

Assembly is a crucial part in the realization of a product. Compared to assembly in the macro world, assembly in the micro world is influenced by scaling effects. These include surface forces, high requirements on placement uncertainty and small product dimensions. Conventional high-speed assembly in many cases utilizes suction grippers. However...

Improvement of micro endmill geometry for micro hard milling application

One of the applications of the micromilling technology is to machine micro features on moulds by direct machining of hardened tool steels. However at this moment, this process is not industrial applicable because of the encountered problems, such as the big tool deflection, severe tool wear, and pre-mature tool breakage. A detailed examination...

Improved method for the cutting coefficients calculation in micromilling force modeling

This paper discusses the influence of runout on the calculation of the coefficients of mechanistic force models in micromilling. A runout mode is used to study the change of chip thickness, tool angles, and immersion period of two cutting edges of micro endmills due to runout. A new method to find the cutting coefficients was proposed based on...

Test results of an adaptive deformable mirror for future large telescopes

Light traveling from a star suffers from optical distortion caused by the earth’s atmosphere. Adaptive optics (AO) is used in ground-based telescopes to correct these distortions (figure 1). In an AO system a real-time control system drives a deformable mirror based on information from the wavefront sensor.

Actuator grid performance for an adaptive deformable mirror

An adaptive deformable mirror (DM) with a distributed control system is being developed to correct both the temporal and spatial high frequent distortions and limit the power dissipation to a few mWs per actuator.

EUV reticles Reticle handling Particles Nanoscale Particle-free handling Storage