Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), Tamer, M.S. (author), Hatakeyama, K. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Piras, D. (author) The semiconductor industry needs to fit ever more devices per unit area to improve their performance; hence a trend towards increasingly complex structures by varying material combinations and 3D geometries with increasing aspect ratios. The new materials used may be optically opaque, posing problems for traditional optical metrology methods....
conference paper 2022
