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document: Latest developments on EUV reticle and pellicle research and technology at TNO
Verberk, R. (author), Koster, N.B. (author), te Sligte, E. (author), Staring, W.P.M. (author)
conference paper 2017

document: Characterizing electron beam induced damage in metrology and inspection of advance devices
Mohtashami, A. (author), Navarro, V. (author), Sadeghian Marnani, H. (author), Englard, I. (author), Shemesh, D. (author), Malik, N.S. (author)
conference paper 2017