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conference paper 2017
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Roozeboom, F. (author), de Gendt, S. (author), Elam, J.W. (author), van der Straten, O. (author), Dendooven, J. (author), Liu, C. (author)
Air Liquide; Applied Materials; Dielectric Science and Technology; Electronics and Photonics; et al.; Gelest
article 2017