Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 8

Traditionally, the topics of this annual symposium focus upon the continuous scaling in CMOS integrated circuit manufacturing (More Moore and Beyond Moore for short) combined with the opportunities from growing diversification including sensors and embedded functionality (More than Moore). Thus, the main objective is to exchange recent advances...

Atomic Layer Deposition Applications 13

Preface

Air Liquide; Applied Materials; Dielectric Science and Technology; Electronics and Photonics; et al.; Gelest

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 7