Searched for: author%3A%22van+der+Heijden%2C+R.W.%22
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Fiore, A. (author), Galeotti, F. (author), Liu, T. (author), Petruzzella, M. (author), Sersic-Vollenbroek, I. (author), Lindgren, G.G. (author), Pagliano, F. (author), van Otten, F.W.M. (author), van Veldhoven, P.J. (author), Pogoretskiy, V. (author), Jiao, Y. (author), Mohtashami, A. (author), Sadeghian Marnani, H. (author), van der Heijden, R.W. (author)
In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.
conference paper 2021
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Galeotti, F. (author), Seršić Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F. (author), van Otten, F.W.M. (author), Zobenica, Aa. (author), Mohtashami, A. (author), Sadeghian Marnani, H. (author), van der Heijden, R.W. (author), Fiore, A. (author)
Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applications such as accelerometry, mass sensing, and atomic force microscopy. While optics provides high resolution and bandwidth, integration of sensor readout is required to achieve low-cost, compact, and parallelizable devices. Here, we present a...
article 2020
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Galeotti, F. (author), Sersic-Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F.M. (author), van Otten, F.W.M. (author), Zobenica, Z. (author), Sadeghian Marnani, H. (author), Mohtashami, A. (author), van der Heijden, R.W. (author), Fiore, A. (author)
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
conference paper 2019
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Petruzella, M. (author), Zobenica, Z. (author), Cotrufo, M. (author), Zardetto, V. (author), Mameli, A. (author), Pagliano, F. (author), Koelling, S. (author), van Otten, F.W.M. (author), Roozeboom, F. (author), Kessels, W.M.M. (author), van der Heijden, R.W. (author), Fiore, A. (author)
A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This...
article 2018
Searched for: author%3A%22van+der+Heijden%2C+R.W.%22
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