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van den Dool, T.C. (author), Kramer, L. (author), Kruidhof, R. (author), Kastelein, A. (author), Dekker, B. (author), Nieuwkoop, E. (author), Lugtenburg, J. (author)This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleaning. All at the nano-scale. The carriers can make large movements in X-and Y-direction and have a...other 2019
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Kramer, L. (author), van den Dool, T.C. (author), Witvoet, G. (author)Abstract: High throughput qualification of semiconductor devices is needed to improve cost efficiency. This paper describes a nano-precision capable, multi-agent, flexible positioning platform, which can be used to increase (metrology) throughput in semiconductor industry by parallelization of measurements. It is based on magnetic levitation and...conference paper 2019
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Kramer, L. (author), van den Dool, T.C. (author), Witvoet, G. (author)A nano-precision-capable, multi-agent, flexible positioning platform can be used to increase (metrology) throughput in semiconductor industry by parallelisation of measurements. It is based on magnetic levitation (MagLev) and 6-DoF control, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system...article 2019
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van den Dool, T.C. (author), Gielesen, W. (author), Kamphues, F. (author), Loix, N. (author), Kooijman, P.P. (author), de Vries, C. (author), van Weers, H. (author), Fleury, K. (author), Stockman, Y. (author), Velsink, G. (author), Benoit, J. (author), Poupinet, A. (author), Sève, F. (author), TNO Industrie en Techniek (author)TNO, in cooperation with Micromega-Dynamics, SRON, Dutch Space and CSL, has designed a compact breadboard cryogenic delay line (figure 1) for use in future space interferometry missions. The work is performed under ESA contract 17.747/03 in preparation for the DARWIN mission. The breadboard (BB) delay line is representative of a flight mechanism...conference paper 2017
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Gielesen, W.L.M. (author), de Bruijn, D. (author), van den Dool, T.C. (author), Kamphues, F. (author), Meijer, E. (author), Braam, B.C. (author)GAIA is a global space astrometry mission, successor to the Hipparcos mission, launched in 1989. The GAIA spacecraft is being built by EADS Astrium France and is scheduled for launch in 2013. At a distance of 1.5 million km from Earth at Lagrangian point L2, slowly spinning around its axis, GAIA will monitor each target star about 100 times over...conference paper 2017
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Koek, W.D. (author), Nijkerk, M.D. (author), Smeltink, J.A. (author), van den Dool, T.C. (author), van Zwet, E.J. (author), van Baars, G.E. (author)TNO is developing a High Power Adaptive Mirror (HPAM) to be used in the CO2 laser beam path of an Extreme Ultra-Violet (EUV) light source for next-generation lithography. In this paper we report on a developed methodology, and the necessary simulation tools, to assess the performance and associated sensitivities of this deformable mirror. Our...conference paper 2017
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Huisman, R. (author), Paalvast, S. (author), Brandl, B.R. (author), van den Dool, T.C. (author), Eggens, M. (author), Janssen, H. (author), Aitink-Kroes, G. (author), Molster, F. (author), Teuwen, M. (author), Venema, L. (author), Jayawardhana, B. (author)We present the main results of the performance test campaign of the Mid-Infrared European Extremely Large Telescope Imager and Spectrograph (METIS) Cold Chopper Demonstrator (MCCD). This tip/tilt mirror, which operates at a temperature of 77 K, is one of the critical components in the METIS for the European Extremely Large Telescope. The...article 2016
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), Winters, J. (author), Crowcombe, W.E. (author), Kramer, G.F.I. (author), van den Dool, T.C. (author), van Es, M.H. (author)We have developed a high speed, miniature scanning probe microscope (MSPM) integrated with a Positioning Unit (PU) for accurately positioning the MSPM on a large substrate. This combination enables simultaneous, parallel operation of many units on a large sample for high throughput measurements. The size of the MSPM is 19 × 45 × 70 mm3. It...article 2015
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Sadeghian Marnani, H. (author), van den Dool, T.C. (author), Uziel, Y. (author), Bar Or, R. (author)This paper aims at unraveling the mystery of damage in high speed AFMs for 1X node and below. With the device dimensions moving towards the 1X node and below, the semiconductor industry is rapidly approaching the point where existing metrology, inspection and review tools face huge challenges in terms of resolution, the ability to resolve 3D,...conference paper 2015
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Sadeghian Marnani, H. (author), Herfst, R.W. (author), van den Dool, T.C. (author), Crowcombe, W.E. (author), Winters, J. (author), Kramers, G.F.I.J. (author)Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...conference paper 2014
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- Sadeghian Marnani, H. (author), van den Dool, T.C. (author) article 2014
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Herfst, R.W. (author), Klop, W.A. (author), Eschen, M. (author), van den Dool, T.C. (author), Koster, N.B. (author), Sadeghian Marnani, H. (author)Optical beam deflection (OBD) measurement method is very popular in various types of scanning probe microscopy (SPM) and micro/nanomechanical sensors to measure a mechanical motion. This paper reports the detail design and implementation of a very low drift (2 nm over 1000 s), high bandwidth (40 MHz) and low noise (15 fm/VHz) OBD measurement...article 2014
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Mora, A. (author), Biermann, M. (author), Brown, A.G.A. (author), Busonero, D. (author), Carminati, L. (author), Carrasco, J.M. (author), Chassat, F. (author), Erdmann, M. (author), Gielesen, W.L.M. (author), Jordi, C. (author), Katz, D. (author), Kohley, R. (author), Lindegren, L. (author), Loeffler, W. (author), Marchal, O. (author), Panuzzo, P. (author), Seabroke, G. (author), Sahlmann, J. (author), Serpell, E. (author), Serraller, I. (author), van Leeuwen, F. (author), van Reeven, W. (author), van den Dool, T.C. (author), Vosteen, L.L.A. (author)The Gaia payload ensures maximum passive stability using a single material, SiC, for most of its elements. Dedicated metrology instruments are, however, required to carry out two functions: monitoring the basic angle and refocusing the telescope. Two interferometers fed by the same laser are used to measure the basic angle changes at the level...conference paper 2014
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Sadeghian Marnani, H. (author), van den Dool, T.C. (author), Crowcombe, W.E. (author), Herfstra, R.W. (author), Winters, J. (author), Kramers, G.F.I.J. (author), Koster, N.B. (author)With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...conference paper 2014
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Sadeghian Marnani, H. (author), Koster, N.B. (author), van den Dool, T.C. (author)The main driver for Semiconductor and Bio-MEMS industries is decreasing the feature size, moving from the current state-of-the-art at 22 nm towards 10 nm node. Consequently smaller defects and particles become problematic due to size and number, thus inspecting and characterizing them are very challenging. Existing industrial metrology and...conference paper 2013
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Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.M. (author), Leinders, S.M. (author), Harmsma, P.J. (author), Tabak, E. (author), van den Dool, T.C. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)Strain gauges are widely employed in microelectromechanical systems (MEMS) for sensing of, for example, deformation, acceleration, pressure, or sound [1]. Such gauges are typically based on electronic piezoresistivity. We propose integrated optical sensors which have particular benefits: insensitivity to electromagnetic interference, no danger...conference paper 2013
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Gielesen, W.L.M. (author), de Bruijn, D. (author), van den Dool, T.C. (author), Kamphues, F.G. (author), Mekking, J. (author), Calvel, B. (author), Laborie, A. (author), Coatantiec, C. (author), Touzeau, S. (author), Erdmann, M. (author), Gare, P. (author), Monteiro, D. (author)The Gaia mission will create an extraordinarily precise three-dimensional map of more than one billion stars in our Galaxy. The Gaia spacecraft2, built by EADS Astrium, is part of ESA's Cosmic Vision programme and scheduled for launch in 2013. Gaia measures the position, distance and motion of stars with an accuracy of 24 micro-arcsec using two...conference paper 2013
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- Westerveld, W.J. (author), Pozo Torres, J.M. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author) article 2012
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- Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.J. (author), Harmsma, P.J. (author), Nieuwland, R.A. (author), van den Berg, J.H. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author) conference paper 2012
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van den Dool, T.C. (author), Kruizinga, B. (author), Braam, B.C. (author), Hamelinck, R.F.M.M. (author), Loix, N. (author), van Loon, D. (author), Dams, J. (author)TNO, together with its partners, have designed a cryogenic scanning mechanism for use in the SAFARI Fourier Transform Spectrometer (FTS) on board of the SPICA mission. SPICA is one of the M-class missions competing to be launched in ESA's Cosmic Vision Programme in 2022. JAXA leads the development of the SPICA satellite and SRON is the prime...conference paper 2012