Miniaturized reaction chamber for optimized laser-assisted carbon nanotube growth

The localized growth of carbon nanotube structures has potential in many applications such as interconnects, field emitters and sensors. Using a laser to locally heat the substrate offers a highly versatile process compatible with a broad range of substrates and devices. However, for laser-assisted CNT growth, detailed process information, such...

Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a...

Laser-assisted growth of carbon nanotubes - A review

Laser-assisted chemical vapor deposition (LACVD) is an attractive maskless process for growing locally carbon nanotubes at selected places on substrates that may contain temperature-sensitive components. This review gives a comprehensive overview of the reported research with respect to laser assisted CVD for the growth of carbon nanotubes. The...

Kinetics of laser-assisted carbon nanotube growth

Laser-assisted chemical vapour deposition (CVD) growth is an attractive mask-less process for growing locally aligned carbon nanotubes (CNTs) in selected places on temperature sensitive substrates. The nature of the localized process results in fast carbon nanotube growth with high experimental throughput. Here, we report on the detailed...

In-situ localized carbon nanotube growth inside partially sealed enclosures

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a...

Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes

Laser-assisted chemical vapor deposition growth is an attractive mask-less process for growing locally aligned nanotubes in selected places on temperature sensitive substrates. An essential parameter for a successful and reproducible synthesis of nanotubes is the temperature during growth. Here, we demonstrate a temperature feedback control...

Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum...

In situ monitoring of single-wall carbon nanotube laser assisted growth

Laser assisted catalytic chemical vapor deposition has recently emerged as an attractive method for locally growing carbon nanotubes (CNTs) in a cold wall reactor. So far, reported laser assisted CNT growth has been carried out without insitu process monitoring. This has made it difficult to control the growth process and limits the...