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Characterization of optical strain sensors based on silicon waveguides

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.M. (author), Leinders, S.M. (author), Harmsma, P.J. (author), Tabak, E. (author), van den Dool, T.C. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

Strain gauges are widely employed in microelectromechanical systems (MEMS) for sensing of, for example, deformation, acceleration, pressure, or sound [1]. Such gauges are typically based on electronic piezoresistivity. We propose integrated optical sensors which have particular benefits: insensitivity to electromagnetic interference, no danger...

conference paper 2013

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Characterization of a photonic strain sensor in silicon-on-insulator technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

article 2012

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Experimental confirmation of universal relations for microring resonators in SOI technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Nieuwland, R.A. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author)

We present a detailed characterization of a set of microring resonators with bent radii of 1.5 μm, fabricated in silicon-on-insulator technology. Results are in good agreement with the universal relations for coupling between microresonators and dielectric waveguides.

conference paper 2012

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Silicon integrated optomechanical sensors

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.J. (author), Harmsma, P.J. (author), Nieuwland, R.A. (author), van den Berg, J.H. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

conference paper 2012

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Extension of Marcatili's analytical approach for rectangular silicon optical waveguides

Westerveld, W.J. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

Marcatili's famous approximate analytical description of light propagating through rectangular dielectric waveguides, published in 1969, gives accurate results for low-index-contrast waveguides. However, photonic-integrated circuit technology has advanced to high-index-contrast (HIC) waveguides. In this paper, we improve Marcatili's model by...

article 2012

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Extension of Marcatili's analytical approach for 220 nm high waveguides in SOI technology

Westerveld, W.J. (author), Leinders, S.M. (author), Pozo Torres, J.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

Marcatili’s famous approximate analytical description of light propagating through rectangular dielectric waveguides, published in 1969, gives accurate results for low-indexcontrast waveguides. However, silicon-on-insulator (SOI) technology has become one of the focus platforms for integrated optics over the last decade, and the silicon...

conference paper 2012

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Critical coupling of optical microring resonators for opto-mechanical sensors

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Urbach, H.P. (author), Yousefi, M. (author)

conference paper 2012

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Characterization of the effects that play a role in photonic strain sensors in silicon-on-insulator technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

Recently there has been a growing interest in sensing by means of optical microring resonators in photonic integrated circuits (PIC) that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. proposed the use of a waveguide based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI...

conference paper 2011

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Detection of nanobubble generation and stability by a SOI nanophotonic ring resonator

Yang, S. (author), Harmsma, P. (author), Pozo Torres, J.M. (author), Yousefi, M. (author)

Studies on physical aspects of nanobubbles, i.e., nanoscopic soft domains at the liquid-solid interface, have been increasingly undertaken in the past few years, see [1-3] and references therein. On the technical application side, specifically in the field of micro- and nanofluidics, it has been conjectured that nanobubbles are responsible for...

conference paper 2011

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Optimized 3-D simulation method for modeling out-of-plane radiation in silicon photonic integrated circuits

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author)

We present an accurate and fast 3-D simulation scheme for out-of-plane grating couplers, based on 2-D rigorous [finite difference time domain (FDTD)] grating simulations, the effective index method, and the RayleighSommerfeld diffraction formula. In comparison with full 3-D FDTD simulations, the rms difference in electric field is below 5% and...

article 2011

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An on-chip three-port interferometer for metrology and Fiber Bragg Grating interrogation

Harmsma, P.J. (author), Cheng, L.K. (author), Lo Cascio, D.M.R. (author), Yousefi, M. (author)

conference paper 2011

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Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology

Westerveld, W.J. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Pozo Torres, J.M. (author), Urbach, H.P. (author), Yousefi, M. (author)

Silicon-on-insulator (SOI) technology has become one of the focus platforms for photonic integrated circuits (PICs). The CMOS technology opens the possibility for reliable mass fabrication of cost-effective photonic circuits. Recently there has been a growing interest in direct optical sensing of, for example, temperature, pressure or strain,...

conference paper 2011

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Vertical interconnection of SOI photonic integrated circuits

Hagen, R. (author), Pozo Torres, J.M. (author), Kazmierczak, A. (author), Westerveld, W.J. (author), Harmsma, P.J. (author), van den Berg, J.H. (author), Schmits, R. (author), Yousefi, M. (author), Cabezon, M. (author), Villafranca, A. (author), Izquierdo, D. (author), Garces, J.I. (author)

One of the important issues of System-on-a-package integration is the interconnection between independent Photonic Integrated Circuits (PICs). In this work, this issue is addressed by the use of Vertical Grating Couplers (VGCs) as the element for the interconnection between two Silicon-on-Insulator (SOI) PICs. Theoretical simulations using the...

conference paper 2011

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Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

Pozo Torres, J.M. (author), Westerveld, W. (author), Harmsma, P.J. (author), Yang, S. (author), Bodis, P. (author), Nieuwland, R. (author), Lagioia, M. (author), Lo Cascio, D.M.R. (author), Staats, J. (author), Schmits, R. (author), Berg, H.V.D. (author), Tabak, E. (author), Green, K. (author), Urbach, H.P. (author), Cheng, L.K. (author), Yousefi, M. (author)

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial...

conference paper 2011

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Integrated 3x3 Interferometer

Staats, J.P. (author), Harmsma, P.J. (author), Cheng, L.K. (author), Lo Cascio, D.M.R. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

The interferometer based on the fiber 3x3 coupler is already a well-known device for measuring displacements and wavelength shifts. TNO is currently working on the fabrication of an integrated version of this versatile interferometer on Silicon-On-Insulator. The integrated interferometer is expected to be far more stable then the fiber version,...

conference paper 2010

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An alternative to full 3d simulations of out-of-plane grating couplers based on 2d fdtd simulations, the effective index method and the rayleigh ii integral.

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010

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Low-cost packaging concepts for integrated nanophotonics

Rijnveld, N. (author), van der Neut, F.J.A. (author), Harmsma, P.J. (author), Lo Cascio, D.M.R. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

Coupling an optical chip to its surroundings is very hard compared to an electrical chip. This complexity is mainly caused by alignment and accuracy challenges and is driving the cost price up to levels at which the commercial benefits of optical chips are no longer obvious, despite their many great technological advantages. Up to 80% of an...

conference paper 2010

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Optimization of an out-of-plane grating coupler using a novel 3d simulation scheme

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010

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Designing and simulating an AWG spectrometer on a SOI platform

Lagioia, M. (author), Harmsma, P.J. (author), Bodis, P. (author), Agovic, K. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

An Arrayed Waveguide Grating (AWG) is a wavelength-based dispersive device capable of combining or separating light signals at different wavelengths. The contribution of this publication is twofold. Firstly, we review the design procedure of an AWG for integrated spectrometry applications and simulate its transmission spectrum on a Silicon On...

conference paper 2010

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Towards a fibre to waveguide coupling scheme

van den Berg, J.H. (author), Nieuwland, R.A. (author), Bodis, P. (author), Harmsma, P.J. (author), Agovic, K. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

Silicon based SOI PICs are finding new applications in the field of sensing. Since Silicon does not produce light, to deploy these sensors in real-world applications a fiber-chip connection is required. In this work we detail the fabrication of V-grooves for fiber attachment to the chip, including the design, (hard) masking and the etching...

conference paper 2010