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Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane

Westerveld, W.J. (author), Leinders, S.M. (author), Neer, P.L.M.J. (author), Urbach, H.P. (author), de Jong, N. (author), Verweij, M.D. (author), Rottenberg, X. (author), Rochus, V. (author)

Future applications of ultrasonography in (bio-)medical imaging require ultrasound sensor matrices with small sensitive elements. Promising are opto-mechanical ultrasound sensors (OMUS) based on a silicon photonic ring resonator embedded in a silicon-dioxide acoustical membrane. This work presents new OMUS modelling: acousto-mechanical non...

conference paper 2019

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Modelling and characterization of optical micromachined ultrasound sensors with a silicon photonic ring resonator in a buckled acoustical membrane

Westerveld, W.J. (author), Leinders, S.M. (author), van Neer, P.L.M.J. (author), Snyder, B. (author), Urbach, H.P. (author), de Jong, N. (author), Verweij, M.D. (author), Rottenberg, X. (author), Rochus, V. (author)

Future applications of ultrasonography in (bio-)medical imaging require ultrasound sensor matrices with small sensitive elements. Promising are opto-mechanical ultrasound sensors (OMUS) based on a silicon photonic ring resonator embedded in a silicondioxide acoustical membrane. This work presents new OMUS modelling: acoustomechanical non-linear...

conference paper 2018

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A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane

Leinders, S.M. (author), Westerveld, W.J. (author), Pozo Torres, J.M. (author), van Neer, P.L.M.J. (author), Snyder, B. (author), O'Brien, P. (author), Urbach, H.P. (author), de Jong, N. (author), Verweij, M.D. (author)

With the increasing use of ultrasonography, especially in medical imaging, novel fabrication techniques together with novel sensor designs are needed to meet the requirements for future applications like three-dimensional intercardiac and intravascular imaging. These applications require arrays of many small elements to selectively record the...

article 2015

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First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)

Leinders, S.M. (author), van Dongen, K.W.A. (author), de Jong, N. (author), Verweij, M.D. (author), Westerveld, W.J. (author), Urbach, H.P. (author), van Neer, P.L.M.J. (author), Pozo Torres, J.M. (author)

Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the...

conference paper 2014

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Characterization of optical strain sensors based on silicon waveguides

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.M. (author), Leinders, S.M. (author), Harmsma, P.J. (author), Tabak, E. (author), van den Dool, T.C. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

Strain gauges are widely employed in microelectromechanical systems (MEMS) for sensing of, for example, deformation, acceleration, pressure, or sound [1]. Such gauges are typically based on electronic piezoresistivity. We propose integrated optical sensors which have particular benefits: insensitivity to electromagnetic interference, no danger...

conference paper 2013

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Membrane design of an all-optical ultrasound receiver

Leinders, S.M. (author), van Dongen, K.W.A. (author), de Jong, N. (author), Verweij, M.D. (author), Westerveld, W.J. (author), Urbach, H.P. (author), van Neer, P.L.M.J. (author), Pozo Torres, J.M. (author)

Ultrasound sensors such as piezoelectric transducers and CMUTs are successfully used for medical imaging. However, especially wiring of individual elements is difficult in the fabrication of small piezoelectric arrays, used in, e.g. the field of intravascular imaging. As an alternative, we designed a novel type of ultrasound receiver based on...

conference paper 2013

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Characterization of a photonic strain sensor in silicon-on-insulator technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

article 2012

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Experimental confirmation of universal relations for microring resonators in SOI technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Nieuwland, R.A. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author)

We present a detailed characterization of a set of microring resonators with bent radii of 1.5 μm, fabricated in silicon-on-insulator technology. Results are in good agreement with the universal relations for coupling between microresonators and dielectric waveguides.

conference paper 2012

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Silicon integrated optomechanical sensors

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Muilwijk, P.J. (author), Harmsma, P.J. (author), Nieuwland, R.A. (author), van den Berg, J.H. (author), Tabak, E. (author), van den Dool, T.C. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

conference paper 2012

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Extension of Marcatili's analytical approach for rectangular silicon optical waveguides

Westerveld, W.J. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

Marcatili's famous approximate analytical description of light propagating through rectangular dielectric waveguides, published in 1969, gives accurate results for low-index-contrast waveguides. However, photonic-integrated circuit technology has advanced to high-index-contrast (HIC) waveguides. In this paper, we improve Marcatili's model by...

article 2012

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Extension of Marcatili's analytical approach for 220 nm high waveguides in SOI technology

Westerveld, W.J. (author), Leinders, S.M. (author), Pozo Torres, J.M. (author), van Dongen, K.W.A. (author), Yousefi, M. (author), Urbach, H.P. (author)

Marcatili’s famous approximate analytical description of light propagating through rectangular dielectric waveguides, published in 1969, gives accurate results for low-indexcontrast waveguides. However, silicon-on-insulator (SOI) technology has become one of the focus platforms for integrated optics over the last decade, and the silicon...

conference paper 2012

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Critical coupling of optical microring resonators for opto-mechanical sensors

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Urbach, H.P. (author), Yousefi, M. (author)

conference paper 2012

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Characterization of the effects that play a role in photonic strain sensors in silicon-on-insulator technology

Westerveld, W.J. (author), Pozo Torres, J.M. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Leinders, S.M. (author), van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)

Recently there has been a growing interest in sensing by means of optical microring resonators in photonic integrated circuits (PIC) that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. proposed the use of a waveguide based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI...

conference paper 2011

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Optimized 3-D simulation method for modeling out-of-plane radiation in silicon photonic integrated circuits

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author)

We present an accurate and fast 3-D simulation scheme for out-of-plane grating couplers, based on 2-D rigorous [finite difference time domain (FDTD)] grating simulations, the effective index method, and the RayleighSommerfeld diffraction formula. In comparison with full 3-D FDTD simulations, the rms difference in electric field is below 5% and...

article 2011

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Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology

Westerveld, W.J. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Pozo Torres, J.M. (author), Urbach, H.P. (author), Yousefi, M. (author)

Silicon-on-insulator (SOI) technology has become one of the focus platforms for photonic integrated circuits (PICs). The CMOS technology opens the possibility for reliable mass fabrication of cost-effective photonic circuits. Recently there has been a growing interest in direct optical sensing of, for example, temperature, pressure or strain,...

conference paper 2011

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Vertical interconnection of SOI photonic integrated circuits

Hagen, R. (author), Pozo Torres, J.M. (author), Kazmierczak, A. (author), Westerveld, W.J. (author), Harmsma, P.J. (author), van den Berg, J.H. (author), Schmits, R. (author), Yousefi, M. (author), Cabezon, M. (author), Villafranca, A. (author), Izquierdo, D. (author), Garces, J.I. (author)

One of the important issues of System-on-a-package integration is the interconnection between independent Photonic Integrated Circuits (PICs). In this work, this issue is addressed by the use of Vertical Grating Couplers (VGCs) as the element for the interconnection between two Silicon-on-Insulator (SOI) PICs. Theoretical simulations using the...

conference paper 2011

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An alternative to full 3d simulations of out-of-plane grating couplers based on 2d fdtd simulations, the effective index method and the rayleigh ii integral.

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010

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Optimization of an out-of-plane grating coupler using a novel 3d simulation scheme

Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010

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Commercial soi sensor technology

van Zeijl, E. (author), Schmits, R. (author), van den Berg, J.H. (author), Harmsma, P.J. (author), Westerveld, W.J. (author), Lagioia, M. (author), Bodis, P. (author), Ebeling, R.P. (author), Nieuwland, R.A. (author), Yang, S. (author), Lo Cascio, D.M.R. (author), Agovic, K. (author), Enderink, E.J. (author), van Vliet, R.E. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010

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A path towards short-term commercialization of integrated nanophotonic sensors

Westerveld, W.J. (author), Harmsma, P.J. (author), Schmits, R. (author), Lo Cascio, D.M.R. (author), Duisterwinkel, A.E. (author), Agovic, K. (author), van Vliet, R.E. (author), Urbach, H.P. (author), Yousefi, M. (author), TNO Industrie en Techniek (author)

conference paper 2010