Flexible and conformable OLED's

High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation

In this Communication we show that with spatially separated ALD of Al2O3 growth rates of 1.2 nm s-1 can be achievd, showing excellent surface passivation (surface recombination velocities of <2 cm s-1). This implies a revolutionary breakthrough in industrial throughput ALD of Al2O3 passivation of silicon solar cells.

Development of atmospheric pressure CVD processes for highquality transparent conductive oxides

For the past decade TNO has been involved in the research and development of atmospheric pressure CVD (APCVD) and plasma enhanced CVD (PECVD) processes for deposition of transparent conductive oxides (TCO), such as tin oxide and zinc oxide. It is shown that by combining precursor development, fundamental gas phase and surface chemistry studies,...

Development of APCVD process for high quality TCO

For the past decade TNO has been involved in the research and development of atmospheric pressure CVD (APCVD) and plasma enhanced CVD (PECVD) processes for deposition of transparent conductive oxides (TCO), such as tin oxide and zinc oxide. The use of atmospheric deposition processes allows for large scale roll to roll manufacturing, and is...

Electrochemical deposition of TCO's

Progress in EUV optics lifetime expectations

Optics lifetime and contamination is one of the major challenges for extreme ultraviolet (EUV) lithography. The basic contamination and lifetime limiting processes are carbon growth and oxidation of the mirrors. Without appropriate measures, optics lifetime will be limited to a few hours. Within the EUV α-tool project of ASML and Carl Zeiss,...

Vapor pressures of precursors for the CVD of titanium nitride and tin oxide

Evaluation of chemometric models in an FTIR study of the gas phase during atmospheric-pressure CVD of tin oxide thin films

The potentially fast data acquisition capability and high resolution of the Fourier transform infrared (FTIR) spectrometer makes it an attractive tool for in-situ analysis of CVD systems. However, real-time extraction of useful quantitative information from the spectra recorded at medium (4 cm-1) or high (0.5 cm-1) resolution can be a difficult...

Anti-reflectie coatings voor toepassing op zonnecollectoren, PV systemen en tuinbouwkassen

Sol-gel coatings on large area glass sheets for electrochromic devices

The preparation of vanadium and tungsten oxide coatings is described using vanadium oxide tri-2-propoxide/2-propanol and tungsten penta-ethoxide/2-propanol solutions. These solutions are dip coated onto K-glass substrates and cured. For vanadium oxide coatings it is shown that sol-gel/dip coat processing is a feasible production technology for...