Atmospheric Pressure Plasma Assisted Spatial ALD of Silicon Nitride

Atmospheric-pressure plasma-enhanced spatial atomic layer deposition (PE-spatial-ALD) of SiNx is demonstrated for the first time. Using bis(diethylamino)silane (BDEAS) and N2 plasma from a dielectric barrier discharge source, a process was developed at low deposition temperatures (≤ 250 °C). The effect of N2 plasma exposure time and overall...

Area Selective Spatial Atomic Layer Deposition of Silicon Based Materials

Area-selective atomic layer deposition (AS-ALD) holds great potential for advancing device manufacturing.(1) Recently, outstanding progress on this topic has been made in terms of understanding and developing highly selective processes for various material systems; some of these processes have already been transferred into fabs.(2) In this work...

Atmospheric Pressure Plasma Assisted Spatial ALD of Silicon Nitride

Spatial Atomic Layer Deposition for large area and flexible electronics

Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

The realization of hybrid superconductor–semiconductor quantum devices, in particular a topological qubit, calls for advanced techniques to readily and reproducibly engineer induced superconductivity in semiconductor nanowires. Here, we introduce an on-chip fabrication paradigm based on shadow walls that offers substantial advances in device...

High Temperature Thin-Film Barriers for Foldable AMOLED Displays

We present a thin-film dual-layer bottom barrier on PI that is compatible with 350°C backplane processing for OLED displays. We demonstrate OLEDs that survive bending over 0.5 mm radius for 10.000x. Furthermore, we show compatibility of the bottom barrier with the backplane process by fabricating AMOLED displays on GEN1-sized substrates.

High-temperature thin-film barriers for foldable AMOLED displays

We present a thin-film dual-layer bottom barrier on polyimide that is compatible with 350°C backplane processing for organic light-emitting diode displays and that can facilitate foldable active-matrix organic light-emitting diode devices with a bending radius of <2 mm. We demonstrate organic light-emitting diodes that survive bending over 0.5...

Supporting read-across using biological data

Read-across, i.e., filling toxicological data gaps by relating to similar chemicals for which test data are available, is usually done based on chemical similarity. Besides structure and physico-chemical properties, biological similarity based on biological data adds extra strength to this process. In the simplest case, chemically similar...

Toward good read-across practice (GRAP) guidance

Grouping of substances and utilizing read-across of data within those groups represents an important data gap filling technique for chemical safety assessments. Categories/analogue groups are typically developed based on structural similarity and, increasingly often, also on mechanistic (biological) similarity. While read-across can play a key...

Flexible barrier technology for enabling rollable AMOLED displays and upscaling flexible OLED lighting

The availability of a high performance thin-film barrier is the most critical challenge in upscaling and commercializing flexible OLED products. We report a flexible thin-film-barrier technology that meets lifetime specifications for OLED lighting, and demonstrate it in rollable QVGA a-IGZO AMOLED displays. Roll-to-roll manufacturing of this...

Multilevel information storage in ferroelectric polymer memories

Multibit memory devices based on the ferroelectric copolymer P(VDF-TrFE) (poly-(vinylidenefluoride-trifluoroethylene)) are presented. Multilevel microstructures are fabricated by thermal imprinting of spin-coated ferroelectric polymer film using a rigid Si template. Multibit storage in capacitors and thin-film transistor memory is realized by...

Industrial production of enzyme-modified wool fibers for machine-washable bed coverings

Enzyme technology is explored on wool fibers to prevent shrinkage and consolidation behavior during washing of woolen bed coverings using normal household machine conditions. Enzyme modification of wool fibers after two different pretreatments has been realized on industrial scale. Enlarged proteolytic enzyme by chemical modification was applied...