- document
-
Galeotti, F. (author), Lindgren, G. (author), Petruzzella, M. (author), van Otten, F.W.M. (author), Sadeghian Marnani, H. (author), Mohtashami, A. (author), van der Heijden, R. (author), Fiore, A. (author)The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the...article 2021
- document
-
Fiore, A. (author), Galeotti, F. (author), Liu, T. (author), Petruzzella, M. (author), Sersic-Vollenbroek, I. (author), Lindgren, G.G. (author), Pagliano, F. (author), van Otten, F.W.M. (author), van Veldhoven, P.J. (author), Pogoretskiy, V. (author), Jiao, Y. (author), Mohtashami, A. (author), Sadeghian Marnani, H. (author), van der Heijden, R.W. (author)In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.conference paper 2021
- document
-
Keyvani Janbahan, A. (author), van der Veen, G. (author), Tamer, M.S. (author), Sadeghian Marnani, H. (author), Goosen, H. (author), van Keulen, F. (author)The real-time and accurate measurement of tip-sample interaction forces in Tapping Mode Atomic Force Microscopy (TM-AFM) is a remaining challenge. This obstruction fundamentally stems from the causality of the physical systems. Since the input of the dynamic systems propagates to the output with some delay, and multiple different inputs can...article 2020
- document
-
Galeotti, F. (author), Seršić Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F. (author), van Otten, F.W.M. (author), Zobenica, Aa. (author), Mohtashami, A. (author), Sadeghian Marnani, H. (author), van der Heijden, R.W. (author), Fiore, A. (author)Miniaturization of displacement sensors for nanoscale metrology is a key requirement in many applications such as accelerometry, mass sensing, and atomic force microscopy. While optics provides high resolution and bandwidth, integration of sensor readout is required to achieve low-cost, compact, and parallelizable devices. Here, we present a...article 2020
- document
-
van Neer, P.M.L.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Piras, D. (author), Duivenvoorde, T. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)The characterization of buried nanoscale structures nondestructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM was...article 2019
- document
-
Galeotti, F. (author), Sersic-Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F.M. (author), van Otten, F.W.M. (author), Zobenica, Z. (author), Sadeghian Marnani, H. (author), Mohtashami, A. (author), van der Heijden, R.W. (author), Fiore, A. (author)A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.conference paper 2019
- document
-
van Neer, P.L.M.J. (author), van Es, M.H. (author), Piras, D. (author), Navarro, V. (author), Mohtashami, A. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)This work details the initial simulation and experimental GHz SPM work carried out at TNO.other 2019
- document
- van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Shoeibi Omrani, P.S. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Quesson, B.A.J. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author) other 2019
- document
-
Tamer, M.S. (author), van Es, M.H. (author), Sadeghian Marnani, H. (author), van der Lans, M.J. (author)Scanning Probe Microscopy (SPM) has emerged as a metrology solution for the semiconductor industry enabling high throughput defect review and high resolution 3D metrology. TNO has developed a Subsurface Ultrasonic Resonant Force Microscopy (SSURFM) for non-destructive, high resolution imaging of features buried under one or more layers of...other 2019
- document
- van Es, M.H. (author), Fillinger, L. (author), Sadeghian Marnani, H. (author) public lecture 2019
- document
-
van Es, M.H. (author), Fillinger, L. (author), Sadeghian Marnani, H. (author)Extracting quantitative information about dimensions and material properties of buried structures is continuing to be an important but difficult task in metrology. Examples of questions asking for this capability include critical dimension metrology of fins such as the profile (bottom width, top width, height) or the presence and extent of voids...conference paper 2019
- document
-
van Es, M.H. (author), Sadeghian Marnani, H. (author)Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on a change in the sensing cantilever’s resonance frequency to detect subsurface structures through their mechanical properties. It gains sensitivity both from exploiting the cantilevers large dynamical stiffness at high frequency and from using the sensitivity of the shifting...other 2019
- document
-
van Es, M.H. (author), van Riel, M.C.J.M. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very high frequency ultrasound wave which is amplitude modulated at the sensing cantilevers resonance...other 2019
- document
-
Galeotti, F. (author), Sersic-Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F. (author), Zobenica, Z. (author), van Otten, F.W.M. (author), Sadeghian Marnani, H. (author), van der Heijden, R. (author), Fiore, A. (author)Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device...conference paper 2018
- document
-
Speet, B.G. (author), Silvestri, F. (author), Gerini, G. (author), Mashaghi Tabari, S. (author), Sadeghian Marnani, H. (author)In this contribution, we present the application of an optical metasurface polarization rotator in an Atomic Force Microscopy (AFM) setup. In AFM, the laser beam used to measure the cantilever deflection is not entirely intercepted by the cantilever surface. Consequently, the remainder of the beam illuminates part of the surface under...conference paper 2018
- document
-
Keyvani Janbahan, A. (author), Sadeghian Marnani, H. (author), Goosen, H. (author), van Keulen, F. (author)The origin of amplitude reduction in Tapping Mode Atomic Force Microscopy (TM-AFM) is typically attributed to the shift in resonance frequency of the cantilever due to the nonlinear tip-sample interactions. In this paper, we present a different insight into the same problem which, besides explaining the amplitude reduction mechanism, provides a...article 2018
- document
-
van Es, M.H. (author), Mohtashami, A. (author), van Neer, P.L.M.J. (author), Sadeghian Marnani, H. (author)Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important in a wide variety of fields. From fundamental research into the way living cells are built up to process control in semiconductor manufacturing would all benefit from the capability to image nanoscale...article 2018
- document
-
van Es, M.H. (author), Mohtashami, A. (author), Piras, D. (author), Sadeghian Marnani, H. (author)Nondestructive subsurface nanoimaging through optically opaque media is considered to be extremely challenging and is essential for several semiconductor metrology applications including overlay and alignment and buried void and defect characterization. The current key challenge in overlay and alignment is the measurement of targets that are...conference paper 2018
- document
-
Tamer, M.S. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increase the accuracy and the resolution, but these features are much larger than the IC feature size....conference paper 2018
- document
- Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, F. (author) conference paper 2018