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- Roozeboom, F. (author) conference paper 2020
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Vermeer, A.J.P.M. (author), Roozeboom, F. (author), van Deelen, J. (author)Method of depositing an atomic layer on a substrate. the method comprises supplying a precursor gas fraom a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the presursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the...patent 2020
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- Roozeboom, F. (author) conference paper 2020
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- Roozeboom, F. (author) conference paper 2020
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Unnikrishnan, S. (author), Ameen, M. (author), Anothumakkool, B. (author), Haverkate, L. (author), Grob, F. (author), Roozeboom, F. (author)Li-ion batteries have emerged as the key energy storage technology, not only in portable electronics & gadgets but also in electric vehicles (EV) and grid-storage. A combination of high energy density anodes such as silicon or lithium, and Ni- or Li-rich cathode1,2 is necessary to achieve the targeted energy density of >350 Wh/Kg. The challenge...public lecture 2020
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- Ameen, M. (author), Beeker, I. (author), Haverkate, L. (author), Anothumakkool, B. (author), Grob, B. (author), Hermes, D. (author), Huijssen, N. (author), Khandan Del, S. (author), Roozeboom, F. (author), Unnikrishnan, S. (author) public lecture 2020
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- Roozeboom, F. (author) conference paper 2019
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- Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author) public lecture 2019
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- Ameen, M. (author), Poplawski, M. (author), Haverkate, L. (author), Grob, F. (author), Anothumakkool, B. (author), Hermes, D. (author), del Khandan, S. (author), Roozeboom, F. (author), Unnikrishnan, S. (author) public lecture 2019
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- Roozeboom, F. (author), de Gendt, S. (author), Dendooven, J. (author), Elam, J.W. (author), van der Straten, O. (author), Liu, C. (author), Sundaram, G. (author), Illiberi, A. (author) conference paper 2019
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- Mameli, A. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author) public lecture 2019
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Aarik, J. (author), Roozeboom, F. (author)The virtual project on the history of ALP (VPHA) is a worldwide collaborative Open Science initiative started in summer 2013, set up to clarify the early days of Atomic Layer Deposition (ALD), especially related to its two independent discoveries. in this VPHA, early ALD publications are overviewed up to 1986 in an atmosphere of Openness,...public lecture 2019
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- Dow, W.-P. (author), Kondo, K. (author), Hayase, M. (author), Cvelbar, U. (author), Roozeboom, F. (author) conference paper 2019
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Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)Area-selective atomic layer deposition (AS-ALD) has the potential for pushing device manufacturing towards new frontiers. However, the selectivity that can be obtained is often very limited and the throughput of most AS-ALD methods is low, which hampers its industrial acceptance.[1,2] In this work, we present a process for AS-ALD of SiO2 using...public lecture 2019
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- Mione, M.A. (author), Engeln, R. (author), Vandalon, V. (author), Kessels, W.M.M. (author), Roozeboom, F. (author) conference paper 2019
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- Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author) public lecture 2019
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- Roozeboom, F. (author) public lecture 2019
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- Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author) public lecture 2019
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- Mione, M.A. (author), Creyghton, Y. (author), Engeln, R. (author), Kessels, W.M.M. (author), Roozeboom, F. (author) public lecture 2019
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- Mione, M.A. (author), Engeln, R. (author), Vandalon, V. (author), Kessels, W.M.M. (author), Roozeboom, F. (author) public lecture 2019