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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), Tamer, M.S. (author), Hatakeyama, K. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Piras, D. (author)The semiconductor industry needs to fit ever more devices per unit area to improve their performance; hence a trend towards increasingly complex structures by varying material combinations and 3D geometries with increasing aspect ratios. The new materials used may be optically opaque, posing problems for traditional optical metrology methods....conference paper 2022
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van Neer, P.L.M.J. (author), Quesson, B.A.J. (author), Tamer, M.S. (author), Hatakeyama, K. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Piras, D. (author)Several methods are being researched to detect and characterize buried nanoscale structures in hard solid samples. The most common acoustic method is acoustic microscopy. An acoustic microscope is based on a single element transducer operating in pulse-echo mode. The acoustic waves are coupled into a sample using a liquid couplant (eg water) and...article 2021
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van Es, M.H. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Quesson, B.A.J. (author), Fillinger, L. (author), Neer, P.L.M.J. (author)While Atomic Force Microscopy is mostly used to investigate surface properties, people have almost since its invention sought to apply its high resolution capability to image also structures buried within samples. One of the earliest techniques for this was based on using ultrasound excitations to visualize local differences in effective tip...article 2020
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), Es, M. (author), M.H. van, (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), van der Lans, M.J. (author)In Subsurface Scanning Probe Microscopy (SSPM), Atomic Force Microscopy (AFM) is combined with ultrasound. The AFM cantilever is used as a receiver. At low frequencies (O(MHz)) the method can be used to measure the stiffness contrast in a sample and at high frequencies (O(GHz)) to measure scattering based contrast. Both variants use modulated...conference paper 2020
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van Es, M.H. (author), Quesson, B.A.J. (author), Mohtashami, A. (author), Piras, D. (author), Hatakeyama, K. (author), Fillinger, L. (author), van Neer, P.L.M.J. (author)In order to extract ever more performance from semiconductor devices on the same device area, the semiconductor industry is moving towards device structures with increasingly complex material combinations and 3D geometries. To ensure cost effective fabrication of next generation devices, metrology solutions are needed that tackle the specific...conference paper 2020
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van Neer, P.M.L.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), van Riel, M.C.J.M. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Piras, D. (author), Duivenvoorde, T. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author)The characterization of buried nanoscale structures nondestructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM was...article 2019
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- van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Shoeibi Omrani, P.S. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Quesson, B.A.J. (author), van der Lans, M.J. (author), Sadeghian Marnani, H. (author) other 2019
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van Neer, P.L.M.J. (author), Quesson, B.A.J. (author), van Es, M.H. (author), Piras, D. (author), van der Lans, M.J. (author)GOAL: investigate feasibility of top actuated scattering based SSPM using simulations.other 2019
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Quesson, B.A.J. (author), van Neer, P.L.M.J. (author), van Riel, M.C.J.M. (author), van Es, M.H. (author), Piras, D. (author), Hatakeyama, K. (author), Mohtashami, A. (author), Navarro, V. (author), Duivenvoorde, T. (author), Sadeghian Marnani, H. (author)Many techniques are under development for the detection of subsurface defects or cracks. One such method is GHz subsurface probe microscopy (GHz SSPM). Here, modulated GHz elastic waves are transmitted through the bottom of a sample. The waves are scattered by buried features and detected using the probe of an atomic force microscope (AFM),...conference paper 2018
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Hunter, A.J. (author), van Vossen, R. (author), Quesson, B.A.J. (author), Beckers, A.L.D. (author)The remediation of underwater unexploded ordnance (UXO) requires a capability to detect and classify objects on or beneath the seafloor. This can be facilitated partly by use of modern high-frequency imaging sonar. However, this technology is limited in two respects: 1) the high frequencies employed by these systems cannot penetrate into the...conference paper 2013
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Zampolli, M. (author), Nijhof, M.J.J. (author), de Jong, C.A.F. (author), Ainslie, M.A. (author), Jansen, E.H.W. (author), Quesson, B.A.J. (author)The acoustic radiation from a pile being driven into the sediment by a sequence of hammer strikes is studied with a linear, axisymmetric, structural acoustic frequency domain finite element model. Each hammer strike results in an impulsive sound that is emitted from the pile and then propagated in the shallow water waveguide. Measurements from...article 2013
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van Vossen, R. (author), Quesson, B.A.J. (author), Beckers, A.L.D. (author), Zampolli, M. (author), Colin, M.E.G.D. (author), Hunter, A.J. (author)Naval mines, underwater improvised explosive devices (UW-IEDs), and underwater unexploded ordnance (UW-UXO) are concerns for harbour security. In conditions without burial, existing commercial systems, such as the REMUS unmanned underwater vehicle equipped with a (very) high frequency side scan sonar (900/1800 kHz), may be deployed for detection...conference paper 2012
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de Jong, C.A.F. (author), Quesson, B.A.J. (author), Ainslie, M.A. (author), Vermeulen, R.C.N. (author)The NATO standard ‘AMP-15’ [1] provides procedures for the measurement and reporting of the acoustic signature of ships and for the establishment of acoustic signature goals to counter the naval mine threat. Measurements are carried out at dedicated shallow water acoustic ranges. Measurements according to this procedure of the same ship at the...conference paper 2012
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Hunter, A.J. (author), van Vossen, R. (author), Quesson, B.A.J. (author), Colin, M.E.G.D. (author), Zampolli, M. (author), Beckers, A.L.D. (author)Sidescan high-frequency (HF) sonar (i.e., with frequencies higher than 100 kHz) is ideally suited for providing high-resolution images of the seafloor. However, since sound does not penetrate into the sediment at these frequencies, such systems cannot be used for the detection of buried objects, such as naval mines, improvised explosive devices ...conference paper 2012
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Quesson, B.A.J. (author), van Vossen, R. (author), Zampolli, M. (author), Beckers, A.L.D. (author)The aim of the Mine Underwater Detection (MUD) project at TNO is to experimentally investigate the acoustic and magnetic detection of explosives underwater, buried in a soft sediment layer. This problem is relevant for the protection of harbors and littoral assets against terrorist attacks and for the detection of underwater unexploded ordnance ...conference paper 2011
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Quesson, B.A.J. (author), Sabel, J.C. (author), Bouma, H. (author), Dekker, R.J. (author), Lengrand-Lambert, J. (author), TNO Defensie en Veiligheid (author)The future of Mine Countermeasures (MCM) operations lies with unmanned platforms where Automatic Target Recognition (ATR) is an essential step in making the mine hunting process autonomous. At TNO, a new ATR method is currently being developed for use on an Autonomous Underwater Vehicle (AUV), using SAS images of known targets in an operational...conference paper 2010
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TNO Defensie en Veiligheid (author), Quesson, B.A.J. (author), Sheldon-Robert, M.K. (author), Vloerbergh, I.N. (author), Vreeburg, J.H.G. (author)In collaboration with Kiwa Water Research, TNO (Netherlands Organisation for Applied Scientific Research) has investigated the possibilities to detect and classify aberrant sounds in water networks, using acoustic sensors. Amongst the sources of such sounds are pumps, drills, mechanical impacts, which could indicate, for instance, a terrorist's...conference paper 2009
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TNO Defensie en Veiligheid (author), Dol, H.S. (author), Quesson, B.A.J. (author), Benders, F.P.A. (author)Acoustic underwater communication is essential for the participation of friendly submersible vehicles in netcentric operations. To prevent interception of exchanged information and, not less important, detection of the submersibles in a hostile environment, the communication should be sufficiently ‘covert’. One approach is to hide the signal in...conference paper 2008
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Quesson, B.A.J. (author), Schippers, P. (author), Groen, J. (author), Sabel, J.C. (author), Driessen, F.P.G. (author), TNO Defensie en Veiligheid (author)The underwater acoustics group at TNO Defense, Security and Safety has developed two simulation software programs named ALMOST and SIMONA. The first is already commercially used and aims at sonar performance prediction, whereas the second one is used as a tool to generate simulated data for mine hunting scenarios with the aim to test different...conference paper 2005
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