Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Spatial atmospheric pressure molecular layer deposition of alucone films using dimethylaluminum isopropoxide as the precursor

Large-Area atmospheric pressure Spatial ALD for display applications

About the importance of purge time in molecular layer deposition of alucone films

Area-Selective Spatial ALD of SiO2Interleaved with Etch-Back Supercycles: Quantification of Area Selectivity by Low Energy Ion Scattering

Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]

On the role of individual etching components in selective atomic layer processing: Etch and deposit to afford high selectivity

Area-selective deposition of SiO2 based on spatial ALD with interleaved etching steps to obtain high selectivity

Area-selective deposition of SiO2 based on spatial ALD with interleaved etching steps to obtain selectivities > 10 nm

Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO 2 Thin-Film Electrodes

Area-selective atmospheric-pressure spatial ALD of SiO2 using interleaved back-etch steps yielding selectivity > 10 nm

Large‐area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure

Large-area spatial atomic layer deposition of amorphous oxide semiconductors at atmospheric pressure

Highly Efficient and Stable Rigid Perovskite/Si and Flexible Perovskite/CIGS 4-Terminal Tandems

Towards Large Area Stable Perovskite Solar Cells and Modules

Atmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells

Stable and highly transparent Perovskite cell and module for high efficiency Perovskite/c Si 4-terminal tandems

Stable and highly transparent perovskite cells and modules for high efficiency perovskite/c-Si 4-thermal tandems

High Temperature Thin-Film Barriers for Foldable AMOLED Displays

Atmospheric Pressure Spatial ALD Layer for Ambient, Thermally and Light Stable p-i-n Planar Perovskite Solar Cells