Galeotti, F. (author), Sersic-Vollenbroek, I. (author), Petruzzella, M. (author), Pagliano, F.M. (author), van Otten, F.W.M. (author), Zobenica, Z. (author), Sadeghian Marnani, H. (author), Mohtashami, A. (author), van der Heijden, R.W. (author), Fiore, A. (author) A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
conference paper 2019
