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van Meer, M. (author), Deniz, E. (author), Witvoet, G. (author), Oomen, T. (author)Sensors in high-precision mechatronic systems require accurate calibration, which is achieved using test beds that, in turn, require even more accurate calibration. The aim of this paper is to develop a cascaded calibration method for position sensors of mechatronic systems while taking into account the variance of the calibration model of the...conference paper 2023
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Mooren, N. (author), Witvoet, G. (author), Oomen, T. (author)Data-driven feedforward control for tracking of varying and non-resetting point-to-point references requires continuous updating of feedforward parameters instead of task-by-task updating. The aim of this paper is to develop an adaptive feedforward controller for non-resetting point-to-point motion tasks by a data-driven feedforward controller....article 2023
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van Dael, M. (author), Witvoet, G. (author), Swinkels, B. (author), Pinto, M. (author), Casanueva, J. (author), Bersanetti, D. (author), Mantovani, M. (author), Vardaro, M. (author), Oomen, T. (author)Gravitational Wave detectors require feedback control to control the length between the sensitive components of the detector. The degrees of freedom in the control system are inherently coupled and the level of interaction furthermore varies over time. A systematic control design approach for the feedback controllers is presented which provides...article 2022
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van Meer, M. (author), Witvoet, G. (author), Oomen, T. (author)Switched reluctance motors are appealing because they are inexpensive in both construction and maintenance. The aim of this paper is to develop a commutation function that linearizes the nonlinear motor dynamics in such a way that the torque ripple is reduced. To this end, a convex optimization problem is posed that directly penalizes torque...article 2022
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Mooren, N. (author), Witvoet, G. (author), Oomen, T. (author)Repetitive control enables the exact compensation of periodic disturbances if the internal model is appropriately selected. The aim of this paper is to develop a novel synthesis technique for repetitive control (RC) based on a new more general internal model. By employing a Gaussian process internal model, asymptotic rejection is obtained for a...article 2022
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Tacx, P. (author), Habraken, R. (author), Witvoet, G. (author), Kuiper, S. (author), Heertjes, M. (author), Oomen, T. (author)Adaptive optics systems are essential in ground-based astronomical observatories and in laser communication through free space. In particular, turbulence in the atmosphere causes wavefront aberrations that set a limit on the achievable image quality. Adaptive optics systems allow to actively compensate the atmospheric disturbances which leads to...conference paper 2022
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van Dael, M. (author), Witvoet, G. (author), Swinkels, B. (author), Oomen, T. (author)Gravitational Wave (GW) detectors are state-of-the-art mechatronic systems that can measure spatial distortions in the order of 10"18 meters. Two GW detectors that are currently operational are LIGO and Virgo, both of which have already measured GWs, with the first one being measured in 2015 resulting from the collision of two black holes. These...conference paper 2022
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van Dael, M. (author), Witvoet, G. (author), Swinkels, B. (author), Oomen, T. (author)Gravitational Wave (GW) detectors are state-of-the-art mechatronic systems that can measure spatial distortions in the order of 10"18 meters. Two GW detectors that are currently operational are LIGO and Virgo, both of which have already measured GWs, with the first one being measured in 2015 resulting from the collision of two black holes. These...public lecture 2022
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- Inyang-Udoh, U. (author), Guo, Y. (author), Peters, J. (author), Oomen, T. (author), Mishra, S. (author) article 2020
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Mooren, N. (author), Witvoet, G. (author), Oomen, T. (author)Feedforward control is essential in highperformance motion control. The aim of this paper is to develop a unified framework for automatic feedforward optimization from both batch-wise data sets as well as real-time data. A statistical analysis is employed to analyze the effect of noise, i.e., an iteration varying disturbance, on feedforward...conference paper 2019
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Witvoet, G. (author), Peters, J. (author), Kuiper, S. (author), Oomen, T. (author)The overlay performance between different layers of semiconductor devices is a key parameter for correct functionality of such devices. With device features getting increasingly smaller, there is a need for novel and more accurate overlay metrology tools. This paper aims to increase the positioning accuracy of such a novel metrology machine...conference paper 2019
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Evers, W.-J. (author), Besselink, I.J.M. (author), Teerhuis, A.P. (author), Oomen, T. (author), Nijmeijer, H. (author), TNO Industrie en Techniek (author)There is a large body of literature on model validation, but there is no method available that can effectively use asynchronous repeated measurements with low signal-to-noise ratios. The aim of this paper is to present a novel frequency-domain model validation method, which is suitable for this type of measurements. The practical relevance of...conference paper 2010