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Herfst, R.W. (author), Nulkes-de Groot, N. (author), Lucas, P. (author), Bijnagte, T. (author), Dekker, B. (author), Biemond, J.J.B. (author), van Riel, M.J.C.M. (author), van Essen, B.H.M.F. (author), van Koppen, M.E.C.T. (author), Oosterling, J.A.J. (author), Kramer, L. (author), Nieuwkoop, E. (author), Corbet, F. (author), Visser, L. (author), Man, H. (author)
We developed a new 3D-AFM technique that enables imaging of high aspect ratio trenches. By measuring both lateral and vertical forces on a cantilever tip, a subharmonic mode based on the attractive tip-sample forces becomes feasible. This enables the measurement of true 3D information of samples without causing damage. This is especially...
other 2019
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Sadeghian Marnani, H. (author), Nulkes-de Groot, N. (author)
The last four years the research Programme Optomechatronics focused on the development of new key technologies for manufacturing and testing equipment and scientific instrumentation. The challenge is to develop instruments with higher accuracy, less costs and higher throughput than we can achieve today. This is relevant for developing the next...
other 2014